2020
DOI: 10.1063/1.5143030
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Direct measurement of the density and energy level of compensating acceptors and their impact on the conductivity of n-type Ga2O3 films

Abstract: Intrinsic and extrinsic point defects often act as electron traps in oxide-based semiconductors and significantly impact their electrical and optical properties. Here, we show how to measure the density, energy level, and trapping cross section of the compensating acceptors that act as electron traps in Ga2O3 films, and we introduce the sheet trap number or the sheet compensating acceptor number as an essential parameter to fully describe the electrical transport properties of semiconductors. Si-doped β-Ga2O3 … Show more

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Cited by 16 publications
(8 citation statements)
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“…Thus, the current under negative bias will be suppressed. Notably, the trapping/detrapping events are strongly mediated by temperature, that is, less electrons are trapped by the defects when the temperature is increased due to the increased thermal energy of electrons, which makes it easier to escape from the trapping centers (Figure I). Meanwhile, as the electrons transfer from the EGaIn to KTN, they will not be trapped regardless of the temperature due to the energy structure (Figure D,H).…”
Section: Resultsmentioning
confidence: 99%
“…Thus, the current under negative bias will be suppressed. Notably, the trapping/detrapping events are strongly mediated by temperature, that is, less electrons are trapped by the defects when the temperature is increased due to the increased thermal energy of electrons, which makes it easier to escape from the trapping centers (Figure I). Meanwhile, as the electrons transfer from the EGaIn to KTN, they will not be trapped regardless of the temperature due to the energy structure (Figure D,H).…”
Section: Resultsmentioning
confidence: 99%
“…Other [5] Copyright 2020, The Authors, published by Springer Nature. [56] Copyright 2020, The Authors, published by AIP Publisher.…”
Section: Measurements Of Defects and Impurities In Semiconductorsmentioning
confidence: 99%
“…Recently, TL has been applied to detect compensating acceptors in n‐type Ga 2 O 3 films grown by metal–organic chemical vapor deposition (MOCVD) and measure their density and depth in the bandgap. [ 56 ] The films were homoepitaxially grown on semi‐insulating Fe‐doped Ga 2 O 3 single crystals and doped with Si to achieve n‐type conductivity. Details on the film growth, structural characterization, and impurity measurements can be found in Ref.…”
Section: Applications Of Tl and C‐tsps In Semiconductorsmentioning
confidence: 99%
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