Direct synthesized graphene-like film on SiO2: Mechanical and optical properties

Abstract

Abstract. Exploiting CVD technique for carbon deposition from C 2 H 2 +H 2 +N 2 mixture, a graphene-like film synthesized directly on SiO 2 surface of SiO 2 -Si structure was obtained. The graphene-like film was grown under thin Ni layer that is easy exfoliated from graphene-SiO 2 -Si structure. Surface of the film was sufficiently smooth and reveals no winkles and holes; it has a good homogeneity and perfect adhesion to SiO 2 layer. Studying the micro-Raman spectra showed a graphene-like structure of the film; using atomic force microscopic technique, the thickness of film was determined (0.6 nm). Using spectroscopic ellipsometry and simple Cauchy model enabled us to estimate optical parameters of this graphene-like film.