Disk resonator gyroscope with whole-angle mode operation

Taheri-Tehrani, Parsa; Izyumin, Oleg; Izyumin, Igor; Ahn, Chang-Nam; Ng, Eldwin J.; Hong, Vu A.; Yang, Yushi; Kenny, Thomas W.; Boser, Bernhard E.; Horsley, David A.

doi:10.1109/isiss.2015.7102360

Cited by 56 publications

(22 citation statements)

References 6 publications

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“…Because the QMG's high Q-factor results in a low (125 mHz) open-loop rate-sensing bandwidth, force-rebalanced operation [33,34] was also characterized at each bias voltage. The closed-loop bandwidth, shown in figure 8(c), was increased to 40 Hz, although the rate table's bandwidth limited experiments to a maximum input rate frequency of 5 Hz.…”

Section: Scale Factor Measurementsmentioning

confidence: 99%

Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

Taheri-Tehrani

Defoort

Horsley

2017

J. Micromech. Microeng.

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This paper describes the operation of a high quality factor gyroscope in various regimes where electromechanical nonlinearities introduce different forms of amplitude-frequency (A-f ) dependence. Experiments are conducted using an epitaxially-encapsulated 2 × 2 mm 2 quad-mass gyroscope (QMG) with a quality factor of 85 000. The device exhibits thirdorder Duffing nonlinearity at low bias voltages (15 V) due to the mechanical nonlinearity in the flexures and at high bias voltages (35 V) due to third-order electrostatic nonlinearity. At intermediate voltages (~26 V), these third-order nonlinearities cancel and the amplitudefrequency dependence is greatly reduced. A model is developed to demonstrate the connection between the electromechanical nonlinearities and the amplitude-frequency dependence, also known as the backbone curve. Gyroscope operation is demonstrated in each nonlinear operating regime and the key performance measures of the gyroscope's performance, angle random walk (ARW) and bias instability, are measured as a function of drive-mode vibration amplitude. We find that low ARW can be achieved even though the gyroscope's drive mode exhibits large amplitude-frequency dependence, and that bias instability is largely independent of the operating regime.

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Section: Scale Factor Measurementsmentioning

confidence: 99%

Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

Taheri-Tehrani

Defoort

Horsley

2017

J. Micromech. Microeng.

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“…In summary, the above methods can reduce both the threshold and ADB to some extent, but they cannot fundamentally solve the problem of precession angular-rate bias errors introduced by the structural asymmetry of the gyro. The threshold and ADB of RIG are essentially caused by the bias terms of the anisostiffness and anisodamping in the precession angular rate of RIG [14], so the threshold and ADB could be significantly reduced by eliminating the bias terms in real time. To completely eliminate precession angular-rate bias errors, this paper introduces a novel compensation method based on a Fourier series fitting combined with a multiple iteration technique.…”

Section: Introductionmentioning

confidence: 99%

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

et al. 2020

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The structural asymmetry of the MEMS rate-integrating gyro (RIG) mode produces a threshold and an angle-dependent bias (ADB) that cause gyroscopes operating in this mode to stop working at input rates below the threshold and degrade the linearity of the output angle. This defect in the RIG output angle is actually caused by a precession angular-rate bias that results from both damping asymmetry (anisodamping) and stiffness asymmetry (anisostiffness). This paper describes a novel compensation method based on Fourier series fitting combined with a multiple iteration technique. The proposed compensation method can significantly reduce both the input rate threshold and ADB. Simulations indicate that the threshold and ADB caused by anisodamping and anisostiffness can be reduced by three orders of magnitude. An experimental application of this method produced a MEMS RIG threshold as low as 0.05° per second, representing an improvement of two orders of magnitude and lower than has previously been reported. INDEX TERMS MEMS rate-integrating gyro, Asymmetric damping, Asymmetric stiffness, Threshold.

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“…10 In this method, the two superimposed modes are separated using the orthogonality of the eigenmodes, and each mode is controlled independently by two phase-locked loops. 3,[11][12][13][14] In order to construct this type of gyroscope, a degenerate resonator is required. Furthermore, this type of gyroscope can be used as a rate integrating gyroscope that directly measures the rotation angle by reading the phase difference between the two modes.…”

Section: Introductionmentioning

confidence: 99%

“…10 Rate integrating gyroscopes are not temperature dependent like FM gyroscopes, and the measurement bandwidth can be infinity enlarged. 3,[11][12][13][14] In order to construct this type of gyroscope, a degenerate resonator is required. However, actual MEMS resonators have a degree of processing error, so they are not strictly degenerated.…”

Section: Introductionmentioning

confidence: 99%

Automated Frequency and Quality-Factor Matching Method for Frequency Modulated / Rate Integrating Gyroscope

Tsukamoto

Tanaka

2019

IEEJ Trans. SM

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This paper reports an automated tuning method for a frequency modulated / rate integrating gyroscope (FM/RIG). The frequency and quality factor mismatches in a MEMS resonator cause the mode-coupling, thus degrade the accuracy of the gyroscope. The X-Y phase difference and amplitude ratio of driving signals are used as the tuning parameters for the mismatch compensation. An automated tuning method based on the relationship between those tuning parameters and mode-coupling terms were developed. Using the proposed method, the mode-coupling effect, which comes from the frequency and quality factor mismatch, could be 3 orders of magnitude smaller than the noncompensated one. K E Y W O R D Sdegenerated resonator, frequency modulated gyroscope, MEMS gyroscope, mode matching, rate integrating (whole angle) gyroscope Electr Eng Jpn. 2019;209:57-63.

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Disk resonator gyroscope with whole-angle mode operation

Cited by 56 publications

References 6 publications

Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

Automated Frequency and Quality-Factor Matching Method for Frequency Modulated / Rate Integrating Gyroscope

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