Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

Abstract

A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. The polarized light of 1.50µm wavelength is input into the interferometer, which is polarized randomly into upstream and downstream directions. The polarization outputs can be controlled by the space-time input at the Sagnac port. Electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) sensing probes, respectively. Four antenna gains are 2.59dB, 0.93dB, 1.75dB, and 1.16dB, respectively. In manipulation, the sensing probe electron densities are changed by input source power variation. When the electron cloud is excited by the microscopic medium, where the change in electron density is obtained and reflected to the required parameters. Such a system is a novel device that can be applied for brain-device interfering with the dual-mode sensing probes. The obtained WGM sensors are 1.35µm -2 , 0.90µm -2 , 0.97µm -2 and, 0.81µm -2 , respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31prads -1 mm 3 (electrons) -1 , 2.27prads -1 mm 3 (electrons) -1 , 2.22prads -1 mm 3 (electrons) -1 , 2.38prads -1 mm 3 (electrons) -1 are obtained, respectively.