Droplet volume modulation based on multi-waveform superposition for drop-on-demand material jetting

Wang, Xiaopei; Tian, Hongmiao; Guo, Hongzhi; Yan, Chao; Ran, Hao; Zhang, Ruolin; Wang, Chunhui; Li, Xiangming; Chen, Xiaoliang; Shao, Jinyou

doi:10.1016/j.addma.2023.103940

Cited by 2 publications

(1 citation statement)

References 32 publications

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“…Therefore, it affects the next jetting cycle, and satellite droplets are prone to be formed, which poses the challenge of achieving stable droplet jetting. At present, the bipolar waveform with an appropriate interval time is widely used to eliminate the effect of residual pressure oscillations. − Nevertheless, for photoresist coating in this study, the ultralow viscosity of a photoresist with ∼0.71 mPa·s ( Z = 30.969) largely magnifies the effects of residual pressure wave oscillation inside the ink chamber. It is difficult to improve the jetting performance by adjusting the bipolar waveform.…”

Section: Resultsmentioning

confidence: 99%

Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating

Wang,

Yang,

Guo

et al. 2024

Langmuir

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Inkjet printing is introduced into the photoresist coating process for uniform photoresist film formation on silicon wafers with the in-house inkjet experimental prototype. The optimization of a dual negative voltage waveform is proposed to achieve stable droplet jetting for the ultralow viscosity (0.71 mPa·s) photoresist with a 1:10 dilution ratio employed in the semiconductor packaging processes. Moreover, the maximum droplet jetting velocity can reach 9.51 m/s, and the droplet volume is controlled at ∼6.5 pL with excellent droplet concentration. The uniform film of the AZ P4620 photoresist is coated on silicon wafers by quantitatively exploring and optimizing the printhead driving frequency and movement velocity utilizing the droplet deposition model and experimental analysis. Results show that the optimal inkjet parameters with 5 kHz in jetting frequency and 6 mm/s in motion velocity can obtain a film evenness index of 4.81% with the thickness of 0.945 μm, which exhibits a more uniform photoresist film than the spray coating method. The study not only expands the application of the inkjet printing technique but also offers an alternative for photoresist coating in the photolithography process.

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Section: Resultsmentioning

confidence: 99%

Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating

Wang,

Yang,

Guo

et al. 2024

Langmuir

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On-demand jetting of high-viscosity liquid by jet tube impact

Xue,

Zhang,

et al. 2024

Physics of Fluids

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The on-demand jetting of high-viscosity liquid has significant applications in fields such as electronic packaging and bioprinting. Conventional methods for high-viscosity liquid jetting often employ a needle propelling the liquid rapidly, which demands high precision in the manufacturing and assembly of the needle and nozzle, and can potentially damage biomaterials. In this study, a novel method utilizing jet tube impact for on-demand high-viscosity liquid jetting is proposed, leveraging the inherent inertia of the liquid to generate the pressure pulse necessary for on-demand jetting. This method reduces the precision requirements for the device, enables device simplification, and avoids harm to biomaterials. The feasibility of this approach for on-demand high-viscosity liquid jetting is validated through experiments, and by combining numerical simulations, the jetting mechanism is revealed and primary factors influencing jetting performance are investigated. It is found that the water hammer pressure wave induced by the liquid inertia during the sudden velocity change of the jet tube is the predominant driving force for jetting, and the peak pressure can exceed 1 MPa and the peak jet velocity can exceed 15 m/s. An increase in the jet tube impact velocity and an extension of the acceleration duration at the same impact velocity both lead to an increase in the pressure wave amplitude. In addition, a decrease in the liquid level height shortens the period of the pressure wave. These factors all have an influence on the jetting performance. This study provides a new insight and theoretical foundation for the on-demand high-viscosity liquid jetting.

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Droplet volume modulation based on multi-waveform superposition for drop-on-demand material jetting

Cited by 2 publications

References 32 publications

Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating

Inkjet Printing Photoresist with Ultralow Viscosity on Silicon Wafers for Uniform Coating

On-demand jetting of high-viscosity liquid by jet tube impact

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