Dry etch improvements in the SOI wafer flow process for IPL stencil mask fabrication

Letzkus, Florian; Butschke, Joerg; Höfflinger, B.; Irmscher, Mathias; Reuter, Christian; Springer, Reinhard; Ehrmann, Albrecht; Mathuni, Josef

doi:10.1016/s0167-9317(00)00388-9

Cited by 33 publications

(15 citation statements)

References 2 publications

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“…n-Tetradecylphosphonic acid was purchased from PCI Synthesis, Newburyport MA, USA. [25,27,68,69] The unipolar ring oscillators were fabricated using p-channel DNTT TFTs with a gate dielectric based on the alkylphosphonic acid SAM, while the complementary ring oscillators were fabricated using p-channel DNTT and n-channel N1100 TFTs with a gate dielectric based on the fluoroalkylphosphonic acid SAM. The thickness of the native aluminum oxide (AlO x ) layer was increased by a brief oxygen-plasma treatment (30 sccm O 2 , 10 mTorr, 200 W, 30 s).…”

Section: Methodsmentioning

confidence: 99%

Low‐Voltage, High‐Frequency Organic Transistors and Unipolar and Complementary Ring Oscillators on Paper

Kraft

Zaki

Letzkus

et al. 2018

Adv Elect Materials

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Paper substrates for flexible, mobile, and disposable electronic applications draw academic and commercial attention due to their many advantages, such as cost efficiency, low weight, mechanical flexibility, and environmental compatibility. For portable electronic applications, it is important that the electronic devices and circuits can be operated with voltages of a few volts, due to the limitations of mobile power supplies, such as solar cells or energy harvesting devices. Here, low‐voltage organic p‐channel and n‐channel transistors as well as unipolar and complementary ring oscillators are fabricated directly on the surface of a banknote. It is demonstrated that low‐power organic integrated circuits on paper substrates can be operated with supply voltages of less than 3 V and with frequencies of several hundred kilohertz. These results emphasize the prospects of organic transistors for smart paper applications.

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Section: Methodsmentioning

confidence: 99%

Low‐Voltage, High‐Frequency Organic Transistors and Unipolar and Complementary Ring Oscillators on Paper

Kraft

Zaki

Letzkus

et al. 2018

Adv Elect Materials

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“…All transistors and phototransistors were fabricated in the inverted-staggered (bottom-gate, top-contact) configuration on a flexible polyethylene naphthalate (PEN) substrate using a set of 4 high-resolution silicon stencil masks [17]. First, a thin layer of gold (Au) was deposited by thermal evaporation in vacuum and patterned through a first stencil mask to define the routing (interconnect) layer.…”

Section: Fabricationmentioning

confidence: 99%

Flexible low-voltage organic phototransistors based on air-stable dinaphtho[2,3-b:2′,3′-f]thieno[3,2-b]thiophene (DNTT)

Milvich

Zaki

Aghamohammadi

et al. 2015

Organic Electronics

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“…Stencil masks were fabricated from 150 mm silicon-on-insulator wafers [25]. Owing to an ion optical demagnification factor of four, the mask openings are larger than the final magnetic features, which eases the fabrication of the master.…”

Section: Methodsmentioning

confidence: 99%

Nanopatterning of Magnetic Disks by Single‐Step Ar⁺ Ion Projection

Dietzel¹,

Berger

Loeschner

et al. 2003

Advanced Materials

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Large‐area Ar+ projection has been used to generate planar magnetic nanostructures on a 1″‐format hard disk in a single step (see Figure). The recording pattern was transferred to a Co/Pt multilayer without resist processes or any other contact to the delicate media surface. It is conceivable that magnetic nanostructures can be replicated from a single stencil mask on large quantities of disks for future high‐density recording.

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Dry etch improvements in the SOI wafer flow process for IPL stencil mask fabrication

Cited by 33 publications

References 2 publications

Low‐Voltage, High‐Frequency Organic Transistors and Unipolar and Complementary Ring Oscillators on Paper

Low‐Voltage, High‐Frequency Organic Transistors and Unipolar and Complementary Ring Oscillators on Paper

Flexible low-voltage organic phototransistors based on air-stable dinaphtho[2,3-b:2′,3′-f]thieno[3,2-b]thiophene (DNTT)

Nanopatterning of Magnetic Disks by Single‐Step Ar⁺ Ion Projection

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Dry etch improvements in the SOI wafer flow process for IPL stencil mask fabrication

Cited by 33 publications

References 2 publications

Low‐Voltage, High‐Frequency Organic Transistors and Unipolar and Complementary Ring Oscillators on Paper

Low‐Voltage, High‐Frequency Organic Transistors and Unipolar and Complementary Ring Oscillators on Paper

Flexible low-voltage organic phototransistors based on air-stable dinaphtho[2,3-b:2′,3′-f]thieno[3,2-b]thiophene (DNTT)

Nanopatterning of Magnetic Disks by Single‐Step Ar+ Ion Projection

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Nanopatterning of Magnetic Disks by Single‐Step Ar⁺ Ion Projection