Dual-Axis Electromagnetic Scanning Micromirror Using Radial Magnetic Field

Abstract

This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than using the magnetic field oriented 45° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation [1,2]. Forced actuation of the gimbal and resonant actuation of the micromirror provide slow vertical scan and fast horizontal scan respectively. A dual-axis scanner with maximum scan angle of 16.1°, mirror size of 1.5 in diameter, and resonant frequency of 19.7kHz is reported.