Dynamic characterization of thin aluminum nitride microstructures

Phys. Status Solidi (c)

et al. 2010

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In this work we report on microstructures made of AlN for the use as piezoelectric microgenerators in energy harvesting applications. Experimental results on the mechanical and piezoelectrical properties of sputtered AlN thin films deposited on Si(001) substrates as well as results on vibrometry of fabricated microcantilevers are presented. It is shown that due to the constant d33 piezo coefficients of > 5 pm/V, AlN films are well suited for the integration in cantilever structures for powering of low-consumption sensor networks

Section: Vibrometry Measurementsmentioning

confidence: 98%

AlN based microgenerators for powering implantable sensor devices

Bludau

Röhlig

Phys. Status Solidi (c)

et al. 2010

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Static and dynamic characterization of AlN and nanocrystalline diamond membranes

Physica Status Solidi (a)

Zürbig

Heidrich

et al. 2012

In this work, AlN and nanocrystalline diamond thin films as well as multi-layer structures on their basis are characterized towards their mechanical properties. In particular, the Young's modulus E and the residual stress s are obtained by wafer bow measurements of thin films as well as by bulge experiments and vibration measurements of freestanding membranes. Depending on the growth conditions, the AlN thin films, deposited by reactive magnetron sputtering, revealed values of s $ þ300 up to þ400 MPa and E $ 370 GPa, while the diamond films, grown by microwave plasma CVD, showed values of s $ À60 to þ60 MPa and E $ 870 up to 1000 GPa. The values and the accuracy of the characterization techniques used are discussed and their limits are demonstrated.

Biocompatible AlN-based piezo energy harvesters for implants

Heidrich

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Sah

et al. 2011

In this work, we show that thin biocompatible AlN films reveal a stable, frequency independent piezoresponse demonstrating a good applicability for implantable micro-generators. It was demonstrated that although more power is generated by resonant (tensile stressed) systems, e.g. cantilevers and planar membranes, the non-resonant (compressive stressed) systems, e.g. corrugated membranes, are preferable for this purpose due to the generation of sufficient power at low-frequency aperiodic vibrations and at very low accelerations