Dynamic Reaction Cell ICPMS for Trace Metal Analysis of Semiconductor Materials

Dynamic reaction cell ICP-MS for determination of total As, Cr, Se and V in complex matrices: Still a challenge? A review

“…The benefit of using O 2 in the DRC is in its ability of quantifying the specie 75 As 16 O + at mass 91, which is totally free of chloride-based polyatomic interferences, and gaining in sensitivity [67]. Direct determination of trace arsine in gas samples was achieved by determining arsenic as AsO, thus minimizing risks for species conversion during sample capturing and pretreatment [68].…”

“…Low plasma temperatures may work well in the reduction of ClO + , but at ultratrace levels the energy of a cool plasma is not enough to break vanadium oxides and hydroxide molecular ions and V can not be quantified [67].…”

“…Oxygen was adopted to detect V as oxide (m/z 67) in high chloride and sulphate natural water samples. However, the strong isobaric interference from 67 Zn can hamper a reliable quantification of V as oxide. Using a mathematical correction equation for 68 Zn may overcome this interference, but the real limit of this method could be the detection of V at very low concentration [75].…”

Plasma-source mass spectrometry for speciation analysis: state-of-the-art

“…40 Ar + with 40 Ca + ), adducts that are formed through condensation (ca. 80 Ar 2 + with 80 Se + ), or polyatomic ions formed from solvent or matrix products (ca. 40 Ar 35 Cl + with 75 As + ).…”

Development of collision/reaction cell for reduction of spectral interference in ICP mass spectrometry

“…ICP-MS 80 Se as analyte ion, CH4 as reaction gas, Ar as matrix ion ; (B) 40 Ca as analyte ion, CH4 as reaction gas, Ar as matrix ion ; (C) 51 V as analyte ion, NH3 as reaction gas, Cl and ClO as matrix ion …”