Eco-friendly step-and-flash imprint lithography using ultraviolet-curing liquid material with lactulose derivative derived from medicinal drugs for biomicrochips

Abstract

Eco-friendly step-and-flash imprint lithography was investigated for the future high-volume manufacture of biomicrochips. A nanoimprinted ultraviolet-curing liquid material with a lactulose derivative derived from medicinal drugs was found to have excellent UV curing properties, film shrinkage during a UV curing reaction, and good etch selectivity with a silicon-based middle layer in CF4 plasma treatment. 80 nm half-pitch lines of the nanoimprinted ultraviolet-curing liquid material with a lactulose derivative were resolved using the process conditions for a trilayer including a silicon-based middle layer with a high silicon concentration of 21.5 wt % and a novolac-based bottom layer on a 100 mm silicon wafer in step-and-flash imprint lithography.

Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

“…The mechanical properties of the template used in microimprint lithography are important for considering use of the TCGCT. [27][28][29] Young's modulus measurements were performed to characterize the mechanical properties of the above templates and referenced plates using a hardness tester (Shimadzu Dynamic Ultra Micro DUH-211 an industrially acceptable target; however, there is still room for improvement in the template formulation by increasing the concentration of cellulose. [30][31][32] The light transmission rates at wavelengths ranging 200-900 nm in the TCGCT were measured using a spectrophotometer (JASCO V-650).…”

“…The mechanical properties of the template used in microimprint lithography are important for considering use of the TCGCT . Young's modulus measurements were performed to characterize the mechanical properties of the above templates and referenced plates using a hardness tester (Shimadzu Dynamic Ultra Micro DUH‐211).…”

Ultraviolet curing nanoimprint green lithography using water-repellent film derived from biomass for solar cells devices

“…Ecofriendly antiglare film derived from biomass was developed using UV curing nanoimprint green lithography for high-definition display [15]. UV curing nanoimprint green lithography using UV curable liquid material with lactulose derivative derived from medicinal drugs was investigated for bio-microchip [16].…”

Thermal nanoimprint lithography of sodium hyaluronate solutions with gas permeable inorganic hybrid mold for cosmetic and pharmaceutical applications

“…It is used in highprecision and high-resolution fine pattern processing in various applications, such as semiconductors, [1][2][3] displays, 4) fuel cell devices, 5) and solar cell devices. 6,7) Recently, nanoimprint lithography is projected to be used in life science fields such as biosensors, 8,9) cell culture scaffolds, 10,11) and microneedles. 12,13) Compared with lithography techniques that require large and expensive equipment with facilities, such as photolithography, 14,15) extreme ultraviolet lithography, 16,17) electron beam lithography, 18,19) and ion beam methods, 20,21) the nanoimprint lithography of simple molding processes is a low-cost and high-productivity technology that can be applied to various transferred function materials, large areas, and pattern transfer with high aspect ratio and resolution.…”