2021
DOI: 10.3390/nano11092413
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Editorial for Special Issue: Nanoimprint Lithography Technology and Applications

Abstract: Nanoimprint Lithography (NIL) has been an interesting and growing field over the last years since its beginnings in the mid 1990ies [...]

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Cited by 3 publications
(1 citation statement)
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“…Our fabrication method is based on nanoimprint lithography (NIL) (e.g., [21][22][23][24][25]), since it is a scalable, mass-fabrication-suited method for the cost-efficient replication of micro-and nanostructures. NIL has been shown to be able to provide complex micro-and nanotopographies in a single processing step (e.g., [26][27][28][29]), as well as the direct structuring of biocompatible materials (e.g., [30][31][32][33][34]).…”
Section: Introductionmentioning
confidence: 99%
“…Our fabrication method is based on nanoimprint lithography (NIL) (e.g., [21][22][23][24][25]), since it is a scalable, mass-fabrication-suited method for the cost-efficient replication of micro-and nanostructures. NIL has been shown to be able to provide complex micro-and nanotopographies in a single processing step (e.g., [26][27][28][29]), as well as the direct structuring of biocompatible materials (e.g., [30][31][32][33][34]).…”
Section: Introductionmentioning
confidence: 99%