Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

Chen, Zhiming

doi:10.3390/mi15030327

Micromachines

2024

DOI: 10.3390/mi15030327

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Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

Zhiming Chen

Abstract: Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...]

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MEMS Technology in the Evolution of Structural Control Strategies

Durga,

R J,

Singh

et al. 2024

E3S Web of Conf.

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The integration of Micro-Electro-Mechanical Systems (MEMS) into structural control strategies represents a transformative step towards more efficient, precise, and resilient engineering applications. This paper reviews the evolution and current state of MEMS technology in the context of structural control, highlighting key fabrication techniques such as wet and dry etching, sacrificial layer technology, and advanced additive manufacturing (AM). We delve into the unique properties and advantages brought by MEMS in various domains, including drug delivery systems, industrial automation, and tissue engineering. Special attention is given to the comparison of traditional and modern MEMS fabrication methods, examining their impact on device performance, cost-efficiency, and application breadth. The emerging synergy between MEMS and nanotechnology, particularly in enhancing sensor capabilities and fostering new biomedical and environmental applications, is also explored. Through a detailed analysis, this paper underscores the significant role of MEMS in advancing structural control mechanisms and outlines future directions for research and application.

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MEMS Technology in the Evolution of Structural Control Strategies

Durga,

R J,

Singh

et al. 2024

E3S Web of Conf.

View full text Add to dashboard Cite

show abstract

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Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

Abstract: Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...]

Cited by 1 publication

References 16 publications

MEMS Technology in the Evolution of Structural Control Strategies

MEMS Technology in the Evolution of Structural Control Strategies

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