Effect of 2-methoxyethanol on structure and dielectrical properties of (Pb0.25Ba0.15Sr0.6)Tio3 thin films by modified sol–gel technique

Sun, Xiaohua; Sun, Chengliang; Xu, Sheng; Li, Meiya; Zhao, Xingzhong

doi:10.1016/j.jcrysgro.2005.09.055

Cited by 2 publications

(1 citation statement)

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“…Perovskite ferroelectric thin films are being used to develop a new class of electrically tunable microwave devices for their strong electric field dependent dielectric constant in the paraelectric state, such as phase shifters, tunable filters, and voltage controlled oscillators [1][2][3][4]. (Pb 0.25 Ba 0.15 Sr 0.6 )TiO 3 owns the same perovskite structure as the (Ba,Sr)TiO 3 and (Pb,Sr)TiO 3 and has shown relatively excellent dielectric and tunable properties [5,6]. However, (Pb 0.25 Ba 0.15 Sr 0.6 )TiO 3 thin films deposited on Pt/Ti/SiO 2 /Si substrates by rf magnetron sputtering have not yet been studied in detail.…”

Section: Introductionmentioning

confidence: 99%

Dielectric and Tunable Properties of Lead Barium Strontium Titanate Thin Films Fabricated by Radio Frequency Magnetron Sputtering Method

Luo

Sun

Hou

et al. 2013

AMR

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The Pb0.25Ba0.15Sr0.6TiO3 (PBST) thin films have been deposited on Pt/Ti/SiO2/Si substrates at different temperatures by radio frequency (rf) magnetron sputtering method. The microstructure, surface morphology, dielectric and tunable properties of PBST thin films were investigated as a function of deposition temperature. It’s found that the orientation of PBST thin films was adjusted by deposition temperature. The PBST thin film deposited at room temperature shows (100) preferred orientation and its dielectric constant and tunability are higher than that of PBST thin film deposited at 450 °C. Furthermore, the PBST thin film deposited at room temperature shows lower dielectric loss and leakage current, which makes it exhibit higher FOM of 49.47 for its appropriate tunability of 44.38% and low dielectric loss of 0.00897.

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