Effect of Atomic Layer Deposited AlN Layer on Pt/4H-SiC Schottky Diodes

Kim, Hogyoung; Kim, Nam Do; An, Sang Chul; Yoon, Hee Ju; Choi, Byung Joon

doi:10.1007/s42341-018-0058-0

Trans. Electr. Electron. Mater.

2018

DOI: 10.1007/s42341-018-0058-0

|View full text |Cite

Effect of Atomic Layer Deposited AlN Layer on Pt/4H-SiC Schottky Diodes

Hogyoung Kim

Nam Do Kim

Sang Chul An

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2019

2024

Publication Types

Select...

Article3

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

References 36 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Effect of Atomic Layer Deposited AlN Layer on Pt/4H-SiC Schottky Diodes

Cited by 3 publications

References 36 publications

High performance of Ag/AlN/Si Schottky diode: Study of the DC sputtering power effect on its electrical properties

High performance of Ag/AlN/Si Schottky diode: Study of the DC sputtering power effect on its electrical properties

AlN passivation effect on Au/GaN Schottky contacts

Growth of Aluminum Nitride Thin Films by Atomic Layer Deposition and Their Applications: A Review

Contact Info

Product

Resources

About