Effect of Ion Beam Figuring and Subsequent AR Coating Deposition on the Surface Absorption of CaF_2 at 193nm

Mühlig, Christian; Bublitz, Simon; Feldkamp, Roman; Bernitzki, Helmut

doi:10.1364/oic.2016.ta.8

Optical Interference Coatings 2016 2016

DOI: 10.1364/oic.2016.ta.8

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Effect of Ion Beam Figuring and Subsequent AR Coating Deposition on the Surface Absorption of CaF_2 at 193nm

Christian Mühlig

Simon Bublitz

Roman Feldkamp³

et al.

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Effect of Ion Beam Figuring and Subsequent AR Coating Deposition on the Surface Absorption of CaF_2 at 193nm

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