2015
DOI: 10.1016/j.mssp.2015.01.049
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Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation

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Cited by 32 publications
(9 citation statements)
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“…However, it is possible to find reports on biodiesel production with La 3 + ions in zeolite HZSM-5 with oleic acid as a model molecule [17] , on esterification and transesterification reactions of Jathopha oil using the binary metal oxide catalyst CaO-La 2 O 3 [18,19] , on transesterification of Jatropha oil using nano-La 2 O 3 [20] and on transesterification of sunflower oil with ZrO 2 supported on La 2 O 3 [21] . Moreover, it is of great interest to study random distribution of La 2 O 3 over zirconia or the supports and to detect the acid-basic properties and changes produced by La 3 + ions [9,[22][23][24][25] . Biodiesel production is gaining attention as a viable substitute for petroleum diesel because of its uncommon characteristics, such as biodegradability, renewability, lower sulfur content, among others, and biodiesel production by a transesterification reaction is defined by the chains of fatty acid methyl ester (FAME) that can be used as an alternative to diesel engine fuel [26] .…”
Section: Introductionmentioning
confidence: 99%
“…However, it is possible to find reports on biodiesel production with La 3 + ions in zeolite HZSM-5 with oleic acid as a model molecule [17] , on esterification and transesterification reactions of Jathopha oil using the binary metal oxide catalyst CaO-La 2 O 3 [18,19] , on transesterification of Jatropha oil using nano-La 2 O 3 [20] and on transesterification of sunflower oil with ZrO 2 supported on La 2 O 3 [21] . Moreover, it is of great interest to study random distribution of La 2 O 3 over zirconia or the supports and to detect the acid-basic properties and changes produced by La 3 + ions [9,[22][23][24][25] . Biodiesel production is gaining attention as a viable substitute for petroleum diesel because of its uncommon characteristics, such as biodegradability, renewability, lower sulfur content, among others, and biodiesel production by a transesterification reaction is defined by the chains of fatty acid methyl ester (FAME) that can be used as an alternative to diesel engine fuel [26] .…”
Section: Introductionmentioning
confidence: 99%
“…Taking advantage of these reports, current research for achieving high SiO 2 removal rates is aimed at preparing Ce 3+ rich ceria particles through either impurity metal-doping or coating. It is well known that lanthanide (La, Sm, Gd, Nd, and Yb) doping can increase Ce 3+ concentration at the ceria surface, thus enhancing the SiO 2 removal rates [47,48]. Recently, Kim et al have developed the core/shell type Ce 3+ rich ceria abrasive for improved SiO 2 removal rates [49].…”
Section: Chemical Reactions Between Slurries and Dielectric Filmsmentioning
confidence: 99%
“…Physical synthesis follows the top-down approach to synthesize nanoparticles from bulk materials by methods such as pulsed laser ablation [6][7][8]. Chemical synthesis follows the bottom-up approach to synthesize nanoparticles from atomic-level materials by methods such as chemical precipitation [9][10][11], sol-gel process [12][13][14], hydrothermal synthesis [15][16][17], thermal decomposition [18][19][20], microwaveassisted synthesis [21][22][23], microemulsion-assisted synthesis [24], and spray pyrolysis [25]. On the other hand, many plant extracts, dead biomass, and bacteria are used in green synthesis.…”
Section: Introductionmentioning
confidence: 99%