“…Compared to the other Si‐NP synthesis methods, gas‐phase plasma‐chemical processing techniques have unique advantages like one‐step production of free‐standing Si‐NPs, the feasibility of promoting high throughput synthesis, the flexibility of using the precursor material in any desired form (i.e., solid, liquid, or gas form), and the freedom of modifying the material morphology and surface chemistry by taking advantage of tunable plasma parameters. As an example, non‐thermal plasmas, multi‐hollow discharges, and remote expanding thermal plasmas have been reported as suitable synthesis techniques of free‐standing Si‐NPs using various precursors, where in situ surface functionalization and morphological modification via in situ etching are also possible. Higher throughputs up to ∼100 mg min −1 are reported in lab‐scale gas‐phase plasma processing tools, which is already in the order of fab‐scale production expectations for technological applications.…”