Effect of Silane flow rate on microstructure of Silicon films deposited by HWCVD

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Effect of Silane flow rate on microstructure of Silicon films deposited by HWCVD

Cited by 5 publications

References 7 publications

Role of Hydrogen Flow Rate on Microstructure of a-Si:H(n) Films: Spectroscopic Ellipsometry Studies

Role of Hydrogen Flow Rate on Microstructure of a-Si:H(n) Films: Spectroscopic Ellipsometry Studies

Hydrogen effect on nanostructural features of nanocrystalline silicon thin films deposited at 200°C by PECVD

Hydrogen effect on structural and optical properties of in-situ fabricated nc-Si:H prepared by facing targets sputtering

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