Abstract:This work investigates the reliability of copper thin films on various substrates such as ceramics, thin glass and polymer in terms of electromigration behaviour. Copper thin film is used to produce a 10 GHz patch antenna for wireless sensor applications. Low temperature co-fired ceramics (LTCC), Al 2 O 3 -ceramic, thin glass and Liquid crystal polymer (LCP) are used as substrates. The effect of substrate on Cu metallization and on antenna indicator parameters such as resonance frequency, input reflection coef… Show more
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