2022
DOI: 10.48550/arxiv.2205.05615
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Effect of substrate temperature on the optoelectronic properties of DC magnetron sputtered copper oxide films

Abstract: Copper oxide thin films are deposited on quartz substrates by DC magnetron sputtering and the effect of deposition temperature on their optoelectronic properties is examined in detail. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) analysis, Raman spectroscopy, UV-Vis spectroscopy, and four-probe sheet resistance measurements are used to characterize the surface morphology, structural, optical, and electrical properties respectively. Deposition is carried out at room temperature and between 200 an… Show more

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