Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films
 2015
DOI: 10.1116/1.4927164
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Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN

Gang Ye
1
,
Hong Wang
2
,
Serene Lay Geok Ng
3
et al.

Abstract: Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN

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