Effect of vertical deposition angle on structural and optical properties of tantalum oxide nano layers deposited by electron gun evaporation

Darghlou, Somayeh Jalilpour; Kangarlou, Haleh; Razzazi, Vahedeh

doi:10.1016/j.cjph.2021.09.008

Cited by 5 publications

(6 citation statements)

References 30 publications

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“…These substrates exhibit different mechanical, optical, electrical, catalytic, and magnetic properties depending on the type of nanoparticle used for functionalization. As a result, new nanoparticle deposition techniques on these substrates have been developed, among which [ 25 , 26 , 27 , 28 , 29 ] stand out.…”

Section: Deposition Of Nanoparticles On Ceramic Substratesmentioning

confidence: 99%

“…In the study conducted by Somayeh Jalilpour et al [ 25 ], tantalum oxide nanolayers were prepared on a glass substrate (1 × 20 × 20) mm 3 using an ETS160 system at a pressure of 3 × 10 −7 Torr. The layers were obtained under a high vacuum using the electron gun evaporation method (Edwards E19A3).…”

Section: Deposition Of Nanoparticles On Ceramic Substratesmentioning

confidence: 99%

“…The study on the coatings’ crystalline nature and morphological evolution was characterized using X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM), respectively. Surface morphology and roughness were obtained through analysis using an atomic force microscope (AFM) [ 25 ].…”

Section: Deposition Of Nanoparticles On Ceramic Substratesmentioning

confidence: 99%

“…Impurities can significantly affect the quality and properties of the resulting nanomaterials. In vertical deposition, impurities lead to uneven growth, causing thickness, density, and composition variations along the vertical axis, compromising structural integrity and functionality [ 25 ]. Plasma-enhanced deposition is affected by impurities altering plasma chemistry, leading to unintended elements in the nanomaterial.…”

Section: Purity Requirements For Precursors Used In Deposition Techni...mentioning

confidence: 99%

“…Electron beam gun evaporation allows the production of nanolayers, which are widely used for their nonlinear optical properties that change depending on the thickness Nanomaterials 2023, 13, 2586 6 of 25 of the obtained film. This method, in turn, modifies the material's dielectric properties since increasing the film's thickness increases the material's bandgap [25]. The electrochemical deposition also imparts materials with nonlinear optical and photoelectronic properties, which depend on the morphology of the obtained nanowires.…”

Section: Plasma-enhanced Chemical Vapor Deposition (Pecvd)mentioning

confidence: 99%

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Advancements in Nanoparticle Deposition Techniques for Diverse Substrates: A Review

Escorcia-Díaz,

García-Mora,

Rendón-Castrillón

et al. 2023

Nanomaterials

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Nanoparticle deposition on various substrates has gained significant attention due to the potential applications of nanoparticles in various fields. This review paper comprehensively analyzes different nanoparticle deposition techniques on ceramic, polymeric, and metallic substrates. The deposition techniques covered include electron gun evaporation, physical vapor deposition, plasma enriched chemical vapor deposition (PECVD), electrochemical deposition, chemical vapor deposition, electrophoretic deposition, laser metal deposition, and atomic layer deposition (ALD), thermophoretic deposition, supercritical deposition, spin coating, and dip coating. Additionally, the sustainability aspects of these deposition techniques are discussed, along with their potential applications in anti-icing, antibacterial power, and filtration systems. Finally, the review explores the importance of deposition purities in achieving optimal nanomaterial performance. This comprehensive review aims to provide valuable insights into state-of-the-art techniques and applications in the field of nanomaterial deposition.

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