1996
DOI: 10.1063/1.361208
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Effects of a new stacking method on characteristics of multilayered BaTiO3 thin film

Abstract: A new deposition method used to prepare BaTiO3 thin films resulted in multilayered structure with higher dielectric constant, capacitance per unit area, and breakdown strength than those prepared by a conventional stacking method; the new method continuously decreased the substrate temperature after initial deposition of a polycrystalline BaTiO3 layer. The observed high dielectric constant could be explained only by a multilayered amorphous/microcrystalline/polycrystalline structure, the nature of which was co… Show more

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Cited by 26 publications
(7 citation statements)
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“…B ARIUM TITANATE (BaTiO 3 ) has been widely studied in several different forms, including powder, 1-3 bulk, 4-6 thin film, [7][8][9][10][11][12] and multilayer, [13][14][15] because of its excellent electronic and optical characteristics; these include high dielectric constant, transparency in visible wavelength, and high nonlinear optical susceptibility. To satisfy potential microelectronics applications, thin films of BaTiO 3 with good electrical and/or electro-optical properties are required.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…B ARIUM TITANATE (BaTiO 3 ) has been widely studied in several different forms, including powder, 1-3 bulk, 4-6 thin film, [7][8][9][10][11][12] and multilayer, [13][14][15] because of its excellent electronic and optical characteristics; these include high dielectric constant, transparency in visible wavelength, and high nonlinear optical susceptibility. To satisfy potential microelectronics applications, thin films of BaTiO 3 with good electrical and/or electro-optical properties are required.…”
Section: Introductionmentioning
confidence: 99%
“…Several methods are suitable for the formation of thin films. Among these methods, sol-gel, [8][9][10][11] chemical vapor deposition, 7 and sputtering 12,13 processes are most widely favored. The sol-gel approach is arguably one of the easiest methods to obtain good-quality films.…”
Section: Introductionmentioning
confidence: 99%
“…The effective dielectric constant of the films showed a characteristic dispersion with frequency (Figure ) and was equal to 20−25 at 10 kHz, consistent with the values reported previously. ,,, Sawyer−Tower polarization measurements showed paraelectric behavior, as might be expected in view of the structural data, and large leakage currents were observed. Similar behavior for amorphous and polycrystalline BaTiO 3 films led the authors to conclude the amorphous grain-boundary layer had a low dielectric constant and high dielectric losses. Films annealed at 1000 °C had the tetragonal structure suitable for ferroelectric behavior.…”
Section: Resultsmentioning
confidence: 75%
“…The leakage currents for all samples were less than ∼10 −6 A over the electric field range of ± 500 kV cm −2 . The observed phenomena indicate that despite being produced at room temperature, the LbL‐assembled (PAA/13‐nm OA‐BTO NP ) n multilayers can exhibit better insulating properties than conventional polycrystalline BTO (>100 nm) and thermally annealed BTO thin films . However, the (poly(ethylene imine) (PEI)/13‐nm OA‐BTO NP ) n multilayers generated significant leakage currents due to the hydrophilicity of PEI, despite the application of an identical electric field (see Figure S4 in the Supporting Information).…”
Section: Resultsmentioning
confidence: 99%