Effects of N2 or Ar plasma exposure on GaAs/AlGaAs heterojunction bipolar transistors

Hsu, Che-Wei; Chen, C.C; Luo, B.; Ren, F.; Pearton, S. J.; Abernathy, C. R.; Lee, J.W; Mackenzie, Kenneth D.; Sasserath, J. N.

doi:10.1016/s0038-1101(00)00243-4

Solid-State Electronics

2001

DOI: 10.1016/s0038-1101(00)00243-4

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Effects of N2 or Ar plasma exposure on GaAs/AlGaAs heterojunction bipolar transistors

Che-Wei Hsu

C.C Chen

B. Luo

et al.

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Effects of N2 or Ar plasma exposure on GaAs/AlGaAs heterojunction bipolar transistors

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References 14 publications

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