Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Nakazawa, Hiroyuki; Miura, Soushi; Kamata, Ryosuke; Okuno, Saori; Suemitsu, Maki; Abe, Takumi

doi:10.1016/j.apsusc.2012.10.082

Cited by 23 publications

(16 citation statements)

References 46 publications

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“…It is associated with the stretching vibration of sp 2 -C in carbon chains and aromatic rings (D peak) and the symmetric breathing vibration of sp 2 -C only in rings (G peak). , Normally, the G peak position, I D / I G , and FWHM G are crucial information for the sp 2 -C bonding structure. , The G peak positions of the Si-DLC and SiN-DLC films are 1509 and 1515 cm –1 , respectively, indicating that the SiN-DLC film shows a lower internal stress level than that of Si-DLC. The N dopant promotes the formation of sp 2 -C rings, , thus resulting in a higher internal stress level for the SiN-DLC film. There was no significant difference between the I D / I G of Si-DLC (0.43) and SiN-DLC (0.42).…”

Section: Resultsmentioning

confidence: 99%

“…55,56 The G peak positions of the Si-DLC and SiN-DLC films are 1509 and 1515 cm −1 , respectively, indicating that the SiN-DLC film shows a lower internal stress level than that of Si-DLC. The N dopant promotes the formation of sp 2 -C rings, 57,58 thus resulting in a higher internal stress level for the SiN-DLC film. There was no significant difference between the I D /I G of Si-DLC (0.43) and SiN-DLC (0.42).…”

Section: Methodsmentioning

confidence: 99%

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Bio-Tribology and Corrosion Behaviors of a Si- and N-Incorporated Diamond-like Carbon Film: A New Class of Protective Film for Ti6Al4V Artificial Implants

Wei

Zhang

Feng

et al. 2022

ACS Biomater. Sci. Eng.

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Ti6Al4V artificial implants are increasingly demanded for addressing human dysfunction caused by an aging population and major diseases. However, they are restricted due to the release of vanadium and aluminum ions in the process of corrosion and wear. This work is aimed to provide a protective film for Ti6Al4V artificial implants, and then, a Si-incorporated diamond-like carbon (Si-DLC) film and Si-and N-incorporated DLC (SiN-DLC) film were deposited on the surface of Ti6Al4V by plasma-enhanced chemical vapor deposition. Results suggest that the thickness of the as-deposited DLC film is approximately 2 μm, and the SiN-DLC film shows the lowest surface roughness (53.0 ± 3.6 nm) compared with the Ti6Al4V and DLC films. The above DLC film possesses high mechanical properties compared with Ti6Al4V, and the SiN-DLC film shows the best resistance to plastic deformation. In addition, the DLC film exhibits high adhesive strength (>13 N) with Ti6Al4V, which is a prerequisite for service in liquid environments. Whether in SBF solution or SBF + BSA solution, the friction coefficient and wear rate of the above DLC film are much lower than those of Ti6Al4V, and the SiN-DLC film displays the optimal tribological properties (0.072 and 1.82 × 10 −7 mm 3 •N −1 •m −1 , respectively). Moreover, Si-DLC and SiN-DLC films possess similar corrosion resistance but are far better than Ti6Al4V. Cytotoxicity test results show that the SiN-DLC film can significantly improve cell viability and promote cell proliferation to a certain extent. Consequently, the SiN-DLC film is a protective film with more potential for artificial implants.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Bio-Tribology and Corrosion Behaviors of a Si- and N-Incorporated Diamond-like Carbon Film: A New Class of Protective Film for Ti6Al4V Artificial Implants

Wei

Zhang

Feng

et al. 2022

ACS Biomater. Sci. Eng.

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“…In figure 6, the spectra for the same generator powers but a higher flow rate are presented. With increasing Si content, a shift of the G peak to lower wavenumbers as well as a decrease of the D peak, disappearing at approximately 20 at.% Si, was observed by other authors [5,53,49,95]. The disruption of the six-fold aromatic rings by silicon incorporation is the reason for this effect [94].…”

Section: Figurementioning

confidence: 52%

“…Further film modification and improvement can be achieved by the simultaneous incorporation of several elements such as Si-N-DLC [53][54][55] and Si-O-DLC [5,23,45,55], preparation of multilayer coatings [45,56,57] or surface texturing [58].…”

Section: Introductionmentioning

confidence: 99%

Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films

Grotjahn

Aslanbas

Mee

et al. 2013

Surface and Coatings Technology

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“…Thin films of C:Si were synthesized to cover solid structures and deposited by plasma enhanced chemical vapor deposition (PECVD) [9][10][11][12], radiofrequency PECVD (RF-PECVD) [13][14][15], magnetron sputtering (MS) [16,17], hybrid magnetron sputtering/chemical vapor deposition (MS/CVD) [18], and pulsed laser deposition (PLD) [19,20]. Selected permanent Si concentrations of 0 to 21.54 at.% by PECVD [10][11][12], 0 to 17 at.% by RF-PECVD [14,15], 23 and 37.6 at.% by MS [16,17], and 2.8 to 18.6 at.% by PLD [20] were obtained.…”

Section: Introductionmentioning

confidence: 99%

Optimized silicon reinforcement of carbon coatings by pulsed laser technique for superior functional biomedical surfaces fabrication

et al. 2017

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We report on the fabrication of silicon-reinforced carbon (C:Si) structures by combinatorial pulsed laser deposition to search for the best design for a new generation of multi-functional coated implants. The synthesized films were characterized from the morphological, structural, compositional, mechanical and microbiological points of view. Scanning electron microscopy revealed the presence, on top of the deposited layers, of spheroid particulates with sizes in the micron range. No micro-cracks or delaminations were observed. Energy dispersive x-ray spectroscopy and grazing incidence x-ray diffraction pointed to the existence of a C to Si compositional gradient from one end of the film to the other. Raman investigation revealed a relatively high sp hybridization of up to 80% at 40-48 mm apart from the edge with higher C content. Si addition was demonstrated to significantly increase C:Si film bonding to the substrate, with values above the ISO threshold for coatings to be used in high-loading biomedical applications. Surface energy studies pointed to an increase in the hydrophilic character of the deposited structures along with Si content up to 52 mN m. In certain cases, the Si-reinforced C coatings elicited an antimicrobial biofilm action. The presence of Si was proven to be benign to HEp-2 cells of human origin, without interfering with their cellular cycle. On this basis, reliable C:Si structures with good adherence to the substrate and high efficiency against microbial biofilms can be developed for implant coatings and other advanced medical devices.

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Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Cited by 23 publications

References 46 publications

Bio-Tribology and Corrosion Behaviors of a Si- and N-Incorporated Diamond-like Carbon Film: A New Class of Protective Film for Ti6Al4V Artificial Implants

Bio-Tribology and Corrosion Behaviors of a Si- and N-Incorporated Diamond-like Carbon Film: A New Class of Protective Film for Ti6Al4V Artificial Implants

Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films

Optimized silicon reinforcement of carbon coatings by pulsed laser technique for superior functional biomedical surfaces fabrication

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