TiO 2 nanoparticles were surface-modified by a convenient and mild sol-gel method. A novel hybrid membrane material was prepared by crosslinking reaction based on poly(dimethylsiloxane) (PDMS) as organic matrix and TiO 2 nanoparticles as inorganic filler as well as a crosslinking agent. The chemical structure, mechanical and thermal properties, swelling performance and morphology of the hybrid membranes were characterized and investigated by FTIR, SEM, TG, and so on. The results showed that the surface modification method could make the compatibility between organic component and inorganic component good. The ultrathin PDMS hybrid membrane could easily be prepared by crosslinking reaction at room temperature and the conventional solution casting method. The preparation technology enhanced forming-membrane ability of the hybrid membrane, shortened reaction time, and decreased some by-products. In addition, the stress at break and the elongation at break of the hybrid membranes increased significantly with increasing TiO 2 contents. The enhanced mechanical properties of the hybrid membranes will develop potential application of PDMS membranes. POLYM. COMPOS., 38:1541-1548