2020
DOI: 10.3390/coatings10121252
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Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W–N and W–Si–N Films

Abstract: The reactive gas flow ratio and substrate bias voltage are crucial sputtering parameters for fabricating transition metal nitride films. In this study, W–N films were prepared using sputtering with nitrogen flow ratios (f) of 0.1–0.5. W–N and W–Si–N films were then prepared using an f level of 0.4 and substrate bias varying from 0 to −150 V by using sputtering and co-sputtering, respectively. The variations in phase structures, bonding characteristics, mechanical properties, and wear resistance of the W–N and … Show more

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Cited by 10 publications
(7 citation statements)
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“…We store all the data needed for analysis in a data frame as tidy data; i.e., every column is a variable, every row an observation, and every cell a single value. 37 Using an R6 38 configuration object ( Figure 1 ), we specify which variable is in which column making it easy to integrate new inputs in prolfqua if provided as tidy data. For example, to visualize tidy Spectronaut, 39 DiaNN, 10 Skyline 40 outputs, or data in MSstats ( 20 ) format, only a few lines of code are needed to update the prolfqua configuration.…”
Section: Methodsmentioning
confidence: 99%
“…We store all the data needed for analysis in a data frame as tidy data; i.e., every column is a variable, every row an observation, and every cell a single value. 37 Using an R6 38 configuration object ( Figure 1 ), we specify which variable is in which column making it easy to integrate new inputs in prolfqua if provided as tidy data. For example, to visualize tidy Spectronaut, 39 DiaNN, 10 Skyline 40 outputs, or data in MSstats ( 20 ) format, only a few lines of code are needed to update the prolfqua configuration.…”
Section: Methodsmentioning
confidence: 99%
“…With further increase in the Si contents (i.e., for CrSiN-3 (4.8 at.% Si), CrSiN-4 (7.1 at.% Si), and CrSiN-5 (9.2 at.% Si) coatings) the hardness of the coatings and elastic modulus steeply decreases and this can be attributed to the possible high volume fraction of the amorphous phase within the CrSiN-0 coating matrix. It has been reported that an increase in the volume fraction of an amorphous phase within the CrSiN matrix phase resulted in hardness and elastic modulus reduction [ 22 ].
Fig.
…”
Section: Resultsmentioning
confidence: 99%
“…With further increase in the Si contents (i.e., for CrSiN-3 (4.8 at.% Si), CrSiN-4 (7.1 at.% Si), and CrSiN-5 (9.2 at.% Si) coatings) the hardness of the coatings and elastic modulus steeply decreases and this can be attributed to the possible high volume fraction of the amorphous phase within the CrSiN-0 coating matrix. It has been reported that an increase in the volume fraction of an amorphous phase within the CrSiN matrix phase resulted in hardness and elastic modulus reduction [22].…”
Section: Resultsmentioning
confidence: 99%