Effects of thermal processing and iron doping in co-sputtered barium strontium titanate thin films

Abstract

The effects of the thermal processing and iron doping on RF magnetron co-sputtered barium strontium titanate thin film properties have been investigated. X-ray diffraction and Raman spectroscopy have been used to determine the structural evolution of the films as a function of the annealing temperature and the amount of iron dopant. X-ray photoelectron spectroscopy and electron paramagnetic resonance spectroscopy were employed to gain information about the chemical binding states and the defect structure. The enhancement of the quality factor Q, as well as the decreasing permittivity and tunability due to iron acceptor doping are demonstrated.

Improved leakage current density in Fe 3+ /Fe 2+ -doped epitaxially grown Ba 0.6 Sr 0.4 TiO 3 thin films based on the domain matching model

“…There are two kinds of doping in BSTO of the perovskite structure (ABO 3 ), which are the substitutions for A sites of Ba 2+ or Sr 2+ , such as La [24], and the replacement for B sites of Ti 4+ , such as Mg 2+ , Al 3+ , Co 2+ , Fe 3+ /Fe 2+ [25][26][27][28][29], etc. ; Fe 3+ /Fe 2+ have an ionic radius similar to that of Ti 4+ , which means that Fe 3+ /Fe 2+ doping would produce little distortion of the BSTO crystal structure.…”

“…; Fe 3+ /Fe 2+ have an ionic radius similar to that of Ti 4+ , which means that Fe 3+ /Fe 2+ doping would produce little distortion of the BSTO crystal structure. Some works have been carried out to study the effects of Fe doping on the dielectric constant, dielectric loss, tunability, leakage current of BSTO thin films [26][27][28][29]. And those Fe-doped BSTO thin films are prepared by RF magnetron sputtering [26,27], sol-gel [28].…”

“…Some works have been carried out to study the effects of Fe doping on the dielectric constant, dielectric loss, tunability, leakage current of BSTO thin films [26][27][28][29]. And those Fe-doped BSTO thin films are prepared by RF magnetron sputtering [26,27], sol-gel [28]. Those works indicate that Fe doping can improve the BSTO films' properties, such as the enhancement in dielectric constant and tunability, decrease of dielectric loss and leakage current, etc.…”