Effects of Thermal Stabilities for the Ultra Thin Chromium Layers Applied on (Ba, Sr)TiO₃ Thin Films

Abstract

This work reports the temperature-electric properties for the (Ba,Sr)TiO 3 (BST) thin film capacitor using the multi-film structure of BST/ultra-thin-chromium(Cr) layer/BST. The BST(200 nm)/Cr(1-3 nm)/BST(200 nm) multi-films reveal excellent properties in the thermal stabilities of dielectric property, low leakage current and less power dissipation.

Improvement of Electrical Properties of $\hbox{Ba}_{{\bf 0.7}}\hbox{Sr}_{\bf 0.3}\hbox{TiO}_{\bf 3}$ Capacitors With an Inserted Nano-Cr Interlayer

“…Besides, the dielectric constant of BST varies with the operating temperature [6]- [9], which affects the precise capacitance. Previously, nanoferroelectric-based core-shell particles have been used for improving the characteristics of the ferroelectric dielectrics [10], and nanocomposite capacitor shows the promising dielectric properties with the ceramic fillers [11].…”