Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope

Forke, Roman; Shaporin, Alexey; Weidlich, Sebastian; Bülz, Daniel; Hiller, Karla; Kühn, Harald

doi:10.1109/inertial56358.2023.10103983

Cited by 3 publications

References 10 publications

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An automatic Q-factor matching method for eliminating 77% of the ZRO of a MEMS vibratory gyroscope in rate mode

Ren,

Zhou,

Zhou

et al. 2024

Microsyst Nanoeng

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Mismatching quality factors (Q-factors) is one of the main factors causing zero-rate output (ZRO) in degenerate (DE) Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes. To eliminate the ZRO of the DE MEMS gyroscope, this study introduces a method for real-time identification and automatic matching of Q-factors in rate mode. By leveraging the vibration characteristics of the DE MEMS vibratory gyroscope in rate mode, dedicated online test methods are designed to determine the Q-factors for both the drive and sense modes, enabling online identification of the Q-factor mismatching. Furthermore, an automatic Q-factor matching system is designed utilizing the mechanical-thermal dissipation mechanism of the resistive damper. The effectiveness of this proposed method is validated through simulations and experiments conducted on a MEMS disk resonator gyroscope (DRG). The results show a measurement error within 4% for Q-factor identification, and automatic Q-factor matching effectively reduces the ZRO by 77%. Employing this automatic Q-factor matching method successfully reduces the ZRO that is caused by the mismatching of Q-factors in the MEMS DRG from 0.11°/s to 0.025°/s and improves the bias instability (BI) from 0.40°/s to 0.19°/s.

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