Electrical characterization of ethanol sensing device based on Vanadium oxide/Porous Si/Si structure

Chebout, Katia; Iratni, A.; Bouremana, A.; Sam, S.; Keffous, A.; Gabouze, N.

doi:10.1016/j.ssi.2013.09.055

Cited by 14 publications

(10 citation statements)

References 32 publications

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“…[49] Vanadium oxides show enhanced surface reactivity near room temperature. This is evident through the demonstrated sensitivity of VO 2 to methane, [50] and of V 2 O 5 to ethanol [51] and ammonia. [52] In the same context, remarkable photocatalytic activity was reported for V 2 O 5 and V 4 O 9 .…”

Section: Introductionmentioning

confidence: 99%

Vanadium Oxide Compounds: Structure, Properties, and Growth from the Gas Phase

Bahlawane¹,

Lenoble²

2014

Chemical Vapor Deposition

156

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The structure‐driven properties of vanadium oxide have inspired enormous developments in the last decades, especially as a smart material for energy, sensors, and optoelectronics. The large variety of stable and metastable structures of vanadium oxide is discussed, based on the calculated formation energies and a broad overview of their structure‐related properties. The established chemical deposition processes from the gas phase are reviewed with a particular emphasis on the implemented precursors and the obtained vanadium oxide phases. Although a significant fraction of relevant vanadium oxide compounds is achieved by these methods, there are still rewarding challenges related to their controlled elaboration and the investigation of their responsive properties.

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Section: Introductionmentioning

confidence: 99%

Vanadium Oxide Compounds: Structure, Properties, and Growth from the Gas Phase

Bahlawane¹,

Lenoble²

2014

Chemical Vapor Deposition

156

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“…This colloidal solution was deposited onto a flexible PET/ITO substrate and tested to determine surface coverage and the produced thin film morphology. Costa et al observed through their AFM analysis that the V 2 O 5 thin film did not show the presence of spherical particles, instead both the AFM and rugosity (roughness factor) measurements show the surface of the thin film was composed of a V 2 O 5 ribbon structure, a common morphology in V 2 O 5 materials …”

Section: Comparison Of Thin Film Deposition For Vanadium Oxidesmentioning

confidence: 99%

Section: Thin Film Applications and Devicesmentioning

confidence: 99%

“…The incorporation of different VO's into sensing devices is commonplace due to the materials large range of oxidation states and its history as an industrial catalyst. The different VO materials can be used in a variety of sensors as either the main active material or for increasing the sensitivity, such as in the schematic shown in Figure b where the V 2 O 5 is deposited on top of an amorphous silicon electrode to increase the sensitivity for ethanol detection . The implementation and extended use of VO materials can be expected to continue for implementation with state of the art sensors and materials …”

Section: Thin Film Applications and Devicesmentioning

confidence: 99%

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Solution Processable Metal Oxide Thin Film Deposition and Material Growth for Electronic and Photonic Devices

Glynn

O’Dwyer

2016

Adv Materials Inter

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A comprehensive review of recent advances in solution processing and growth of metal‐oxide thin films for electronic and photonic devices is presented, with specific focus on precise solution‐based technological coatings for electronics and optics, and new concepts for oxide material growth for electrochemical, catalytic, energy storage and conversion systems, information technology, semiconductor device processing and related devices. Throughout, the nature of the soluble precursors solutions and their relationship to film formation process by various solution coating techniques are collated and compared, highlighting advantages in precursor design for creating complex oxides for devices. Because of the versatility of solution‐processable oxides and functional material coating, it is important to capture the advances made in oxide deposition for plastic electronics, see‐through and wearable devices, and high‐fidelity thin film transistors on curved or flexible displays. Solution processing, even for oxides, allows control over composition, thickness, optical constants, porosity, doping, tunable optical absorbance/transmission, band structure engineering, 3D‐substrate coating, complex composite oxide formation and multi‐layered oxide systems that are more difficult to achieve using chemical vapor deposition (CVD) or atomic layer deposition (ALD) processes. We also discuss limitations of solution processing for some technologies and comment on the future of solution‐based processing of metal‐oxide materials for electronics, photonics and other technologies.

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“…In regard to sensing, vanadium oxides show enhanced surface reactivity near room temperature, as demonstrated by the sensitivity of VO 2 to methane, and of V 2 O 5 to ethanol and ammonia …”

Section: Introductionmentioning

confidence: 99%

Phase‐selective Route to V‐O Film Formation: A Systematic MOCVD Study Into the Effects of Deposition Temperature on Structure and Morphology

Spanò

Toro

Condorelli

et al. 2015

Chemical Vapor Deposition

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A systematic study into the MOCVD of V-O films using the vanadyl-acetylacetonate [VO(acac) 2 ] precursor is carried out. The films are prepared via low pressure MOCVD on Si(001) substrates. The nature and quality of films are examined by varying operational parameters, e.g., deposition temperature, precursor vaporization rate, and flow of oxygen reacting gas. X-ray diffraction data point to the formation of crystalline films in the range 200À550 8C. Outside of this temperature ranges amorphous phases were obtained. Field-emission scanning electron microscope (FESEM) images indicate very homogeneous surfaces with grain shape and dimensions depending on operational conditions. Energy dispersive X-ray (EDX) and X-ray photoelectron spectroscopy (XPS) analyses point to the absence of any C contamination.

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Electrical characterization of ethanol sensing device based on Vanadium oxide/Porous Si/Si structure

Cited by 14 publications

References 32 publications

Vanadium Oxide Compounds: Structure, Properties, and Growth from the Gas Phase

Vanadium Oxide Compounds: Structure, Properties, and Growth from the Gas Phase

Solution Processable Metal Oxide Thin Film Deposition and Material Growth for Electronic and Photonic Devices

Phase‐selective Route to V‐O Film Formation: A Systematic MOCVD Study Into the Effects of Deposition Temperature on Structure and Morphology

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