2020
DOI: 10.3390/coatings10121165
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Electrical Conductivity and Optical Properties of Nanoscale Titanium Films on Sapphire for Localized Plasmon Resonance-Based Sensors

Abstract: The developing area of plasmonics has led to the possibility of creating a new type of high-speed, high-sensitivity optical sensor for biological environment analysis. The functional layer of such biosensors are nanoscale films of noble metals. In this work we suggest using a thin film of titanium as a functional layer. This paper presents the results of the research on electrical and optical characteristics of 5 to 80 nm thick titanium films deposited on sapphire substrates by magnetron sputtering. It is show… Show more

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Cited by 7 publications
(5 citation statements)
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“…The results of the experiments are shown in Figure 7. Analysis of the reflection spectra of optical radiation from the studied prism/ITO film/analyte system showed the presence of minima related to the SPR excitation [18]. The Analysis of the reflection spectra of optical radiation from the studied prism/ITO film/analyte system showed the presence of minima related to the SPR excitation [18].…”
Section: Study Of Optical Mode Excitation and Plasmon Resonancementioning
confidence: 85%
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“…The results of the experiments are shown in Figure 7. Analysis of the reflection spectra of optical radiation from the studied prism/ITO film/analyte system showed the presence of minima related to the SPR excitation [18]. The Analysis of the reflection spectra of optical radiation from the studied prism/ITO film/analyte system showed the presence of minima related to the SPR excitation [18].…”
Section: Study Of Optical Mode Excitation and Plasmon Resonancementioning
confidence: 85%
“…The main plasmonic materials used in modern SPR sensors are noble metals, which have minimal losses and high chemical stability. SPR sensors operate by generating and registering surface electromagnetic waves after the light hits the conductor-insulator interface [18]. The contacting media (the conducting film and the layer of the analyzed substance) must have permittivities of opposite signs.…”
Section: Methodsmentioning
confidence: 99%
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“…Они имеют химическую стойкость, достаточно высокий показатель преломления в видимом диапазоне, обладают фотокаталитическими и антикоррозионными свойствами. Такое сочетание свойств пленок оксида титана способствует их использованию в устройствах оптики, интегральной фотоники, газочувствительных сенсорах, а также применению в устройствах очистки воздуха и воды от вредных органических соединений [1][2][3][4][5]. Целью настоящей работы является исследование влияния технологического режима нанесения пленок оксида титана методом вакуумно-дугового осаждения на их оптические и фотокаталитические свойства.…”
unclassified
“…Titanium oxide thin films have a number of unique properties: chemical resistance, a sufficiently high refractive index in the visible range, the have photo-catalytic and anticorrosive properties This combination of properties have drawn a great application prospect for their use in optical devices, integrated photonics, gas-sensitive sensors as well as their use in air and water purification devices from harmful organic compounds [1][2][3][4][5]. The purpose of this article is to study the effect of the technological regime of titanium oxide thin films deposition by the means of cathodic arc deposition on their optical and photocatalytic properties.…”
mentioning
confidence: 99%