Electrical validation of massive E-beam defect metrology in EUV-patterned interconnects

Kissoon, Nicola; Poortere, Etienne De; Hellin, David; Decoster, Stefan; Murdoch, Gayle; Larivière, S.; Camerotto, Elisabeth; Halder, Sandip; Leray, Philippe; Jurczak, M.; Schelcher, Guillaume

doi:10.1117/12.2584807

Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV 2021

DOI: 10.1117/12.2584807

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Electrical validation of massive E-beam defect metrology in EUV-patterned interconnects

Nicola Kissoon

Etienne De Poortere

David Hellin³

et al.

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Electrical validation of massive E-beam defect metrology in EUV-patterned interconnects

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