1996
DOI: 10.1080/00202967.1996.11871084
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Electroless Palladium Plating from an Ethylenediamine Complex Bath using Phosphite as a Reducing Agent

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Cited by 7 publications
(5 citation statements)
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“…EDA (en, when referred to as a ligand) is a usually bidentate chelating ligand that has been successfully employed as a complexing agent in the electroless deposition of other noble metals including Ag, [32] Pd [76] and Pt. [37,54] Similar to Pt(IV) it is expected that Ir(III)-ions form en-complexes of the type [Ir(en) x L (6-2x) ] (2x-3) with x = 0-3.…”
Section: Eda-stabilized Plating Solutionmentioning
confidence: 99%
“…EDA (en, when referred to as a ligand) is a usually bidentate chelating ligand that has been successfully employed as a complexing agent in the electroless deposition of other noble metals including Ag, [32] Pd [76] and Pt. [37,54] Similar to Pt(IV) it is expected that Ir(III)-ions form en-complexes of the type [Ir(en) x L (6-2x) ] (2x-3) with x = 0-3.…”
Section: Eda-stabilized Plating Solutionmentioning
confidence: 99%
“…In addition Stremsdoerfer et al have also reported that palladium deposited using this bath formed a good metal-semiconductor junction (Pd/n-GaAs junction) by subsequent annealing up to 550 C [17]. When phosphite or trimethylamine borane was used as reducing agent, the content of phosphorus in the deposit was reduced [19]. Electroless pure palladium was deposited using the following basic bath composition: 0.01 M palladium chloride, 0.08 M ethylenediamine, 0.2 M formic acid, and pH 6 at 60 .…”
Section: Electroless Plating Bath For Palladiummentioning
confidence: 98%
“…Electroless pure palladium was deposited using the following basic bath composition: 0.01 M palladium chloride, 0.08 M ethylenediamine, 0.2 M formic acid, and pH 6 at 60 . When phosphite or trimethylamine borane was used as reducing agent, the content of phosphorus in the deposit was reduced [19].…”
Section: Hypophosphite Bathsmentioning
confidence: 99%
“…There are two primary classifications of electroless Pd plating solutions: (1) an autocatalytic bath that is characterized by the redox reaction between Pd ions and a reductant and (2) an immersion bath that is characterized by the displacement reaction between Pd ions and a sacrificial metal such as Cu, Zn. 7 For instance, hypophosphite is implemented as the reducing agent to yield a Pd-P. 8 A pure Pd film with different crystal orientations was obtained using choline chloride as the reductant. 9 In recent years, surface limited redox replacement (SLRR) reactions were implemented to form Pd atomic layers.…”
mentioning
confidence: 99%
“…7 For instance, hypophosphite is implemented as the reducing agent to yield a Pd-P. 8 A pure Pd film with different crystal orientations was obtained using choline chloride as the reductant. 9 In recent years, surface limited redox replacement (SLRR) reactions were implemented to form Pd atomic layers.…”
mentioning
confidence: 99%