Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source

Guittienne, Ph.; Jacquier, R.; Howling, A.A.; Furno, I.

doi:10.1088/1361-6595/aa59d6

Cited by 8 publications

(8 citation statements)

References 69 publications

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“…The preceding amplitude factor is the same as in equation (16). The corresponding total formula for the power deposition per unit area is then identical to the result obtained by Lieberman [3] for the classical stochastic heating in ICPs except for a factor 3/8.…”

Section: Classical Stochastic Heating In the Ortho Arraymentioning

confidence: 61%

“…The results obtained in this work might be applied not only to the INCA discharge but also to other cases in the literature. Recently another large area discharge based on inductive coupling has been introduced by Hollenstein et al [15,16]. This source consists of a larger number of linear rods either in a plane or in a circular arrangement.…”

Section: Summary and Discussionmentioning

confidence: 99%

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Kinetic model for stochastic heating in the INCA discharge

Czarnetzki¹

2018

Plasma Sources Sci. Technol.

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A novel electron heating mechanism based on periodically structured vortex fields induced in a plane was first proposed in 2014 [U. Czarnetzki and Kh. Tarnev, Physics of Plasmas 21, 123508 (2014)]. This theoretical concept has now been realized in an experiment which confirms efficient collisionless heating in such array structures [Ph. Ahr, T.V. Tsankov, J. Kuhfeld, U. Czarnetzki, submitted to Plasma Sources Science and Technology, arXiv:1806.02043v1 (2018)]. The new concept is called "Inductively Coupled Array": INCA. Here, the physical mechanism behind the collisionless (stochastic) heating is investigated by two analytical models. Firstly, the electron heating rate in an array field structure with an exponential spatial decay of the field in the direction perpendicular to the plane is investigated by stochastically averaging single electron trajectories. The approach is similar to the Lieberman model for the classical stochastic heating in standard inductively coupled plasmas. This analysis shows that classical stochastic heating by thermal motion along the vertical direction makes a negligible contribution. However, there is a strong collisonless non-local heating effect in the plane. In conclusion, heating is non-local in the plane but local in the vertical direction. This insight allows a straightforward solution of the collisionless Boltzmann equation which not only confirms the results of the Lieberman model but provides also explicit expressions for the complex conductivity. Based on the conductivity an effective stochastic collision frequency, the complex damping coefficient and the related field penetration of the field into the plasma is calculated. Finally, elastic collisions with neutral background atoms are included in the model and a condition for dominance of stochastic heating over Ohmic heating is derived.

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Section: Classical Stochastic Heating In the Ortho Arraymentioning

confidence: 61%

Section: Summary and Discussionmentioning

confidence: 99%

Kinetic model for stochastic heating in the INCA discharge

Czarnetzki¹

2018

Plasma Sources Sci. Technol.

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“…Also some concepts using multiple antennas have been proposed. One of the more recent developments is to replace the coils by linear rods [5][6][7] . Apparently, this allows for easy up scaling.…”

Section: Introductionmentioning

confidence: 99%

Electric field measurements on the INCA discharge

Stetzkamp,

Tsankov,

Czarnetzki

2021

Preprint

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Developing large-area inductively coupled plasma sources requires deviation from the standard coil concepts and the development of advanced antenna designs. First steps in this direction employ periodic array structures. A recent example is the Inductively Coupled Array (INCA) discharge, where use is made of the collisionless electron heating in the electric field of a periodic array of vortex field. Naturally, the efficiency of such discharges depends on the how well the experimental array realizes the theoretically prescribed field design. In this work two diagnostic methods are employed to measure the field structure of the INCA discharge. Ex situ B-dot probe measurements are compared to in situ radio-frequency modulation spectroscopy (RFMOS) and good agreement between their results is observed. Both diagnostics show systematic deviations of the experimentally generated field structure from the one employed in the theoretical description of the INCA discharge. The subtleties in applying both diagnostic methods together with an analysis of the possible consequences of the non-ideal electric field configuration and ways to improve it are discussed.

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“…A solution is to depart from the standard concept that uses a flat spiral coil. One possibility is to utilize a network of evenly spaced rods [4][5][6][7]. The parameters of the network are adjusted to be in resonance with the driving frequency.…”

Section: Introductionmentioning

confidence: 99%

Operation of the inductively coupled array (INCA) discharge as a para-array

Stetzkamp

Tsankov

Czarnetzki

2021

J. Phys. D: Appl. Phys.

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The inductively coupled array (INCA) discharge is a plasma source with a tailored electric field configuration that allows efficient stochastic heating of the electrons. The desired field configuration is realized by an array of small planar coils. This discharge configuration offers dense plasma production at pressures as low as 0.1 Pa and option for upscaling to square meter sizes. The theoretical works, which led to the development of the INCA discharge, propose two different electric field configurations—the ortho- and the para-configuration. The initial experimental work (P. Ahr et al 2018 Plasma Sources Sci. Technol. 27 105010) studied the ortho-configuration. Here we investigate the performance of the alternative configuration, the para-array, and compare it to the ortho-configuration. The results show similar behaviour of the electrical and of the plasma parameters. However, on first sight the ortho-array appears to perform better. The differences disappear when the power actually coupled to the plasma is considered. For both configurations the electron density follows the same linear trend with the power coupled into the plasma and the electron temperature remains nearly constant as prescribed by the energy balance equation of the electrons. The power coupling efficiency for both configurations increases with the plasma density, approaching 60% at a plasma density of 1 × 1017 m−3. No signs of saturation are observed. The variation of the electron distribution functions with the pressure shows that in the para-configuration the transition into the stochastic heating mode occurs at a pressure twice lower than that for the ortho-array in a very good agreement with the theoretical expectations. Based on the comparison of the discharge parameters and its performance, the advantages and the shortcomings of using one or the other configuration are outlined.

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Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source

Cited by 8 publications

References 69 publications

Kinetic model for stochastic heating in the INCA discharge

Kinetic model for stochastic heating in the INCA discharge

Electric field measurements on the INCA discharge

Operation of the inductively coupled array (INCA) discharge as a para-array

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