Electron beam lithography for high aspect-ratio trench patterning in thick resist: experimental and simulation results

Zhou, Jianyun; Xiao, Shuaigang; Scholz, W.; Yang, XiaoMin

doi:10.1117/12.656516

Cited by 4 publications

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“…Since the radiation efficiency, η r , for a transducer metallization thicknesses of 1 µm, dominates the match and dissipation efficiency, η r can be improved using thicker metallization (see thickness 2 µm dashed orange curve). For transducers launching exchange spin waves, fabrication methods capable of producing high aspect-ratios, such as 19 : 1 with SAFIER-complemented EBL 45 and greater than 100 : 1 with LIGA 46 , are likely required to maintain a high η r . To validate the theoretical approach, this CPW transducer and YIG film were modeled in HFSS by defining the magnetostatic Polder susceptibility tensor for the YIG film and a uniform bias field of B a = 0.3763 T to target the LTE-U band.…”

Section: Design Methodologymentioning

confidence: 99%

Efficient Electromagnetic Transducers For Spin-Wave Devices

Connelly

Csaba

Aquino

et al. 2021

Preprint

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This paper presents a system-level efficiency analysis, a rapid design methodology, and a numerical demonstration of efficient sub-micron, spin-wave transducers in a microwave system. Applications such as Boolean spintronics, analog spin-wave-computing, and magnetic microwave circuits are expected to benefit from this analysis and design approach. These applications have the potential to provide a low-power, magnetic paradigm alternative to modern electronic systems, but they have been stymied by a limited understanding of the microwave, system-level design for spin-wave circuits. This paper proposes an end-to-end microwave/spin-wave system model that permits the use of classical microwave network analysis and matching theory towards analyzing and designing efficient transduction systems. This paper further compares magnetostatic-wave transducer theory to electromagnetic simulations and finds close agreement, indicating that the theory, despite simplifying assumptions, is useful for rapid yet accurate transducer design. It further suggests that the theory, when modified to include the exchange interaction, will also be useful to rapidly and accurately design transducers launching magnons at exchange wavelengths. Comparisons are made between microstrip and co-planar waveguide lines, which are expedient, narrowband, and low-efficiency transducers, and grating and meander lines that are capable of high-efficiency and wideband performance. The paper concludes that efficient microwave-to-spin-wave transducers are possible and presents a meander transducer design on YIG capable of launching λ=500nm spin waves with an efficiency of -4.45 dB and a 3 dB-bandwidth of 134 MHz.

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Section: Design Methodologymentioning

confidence: 99%

Efficient Electromagnetic Transducers For Spin-Wave Devices

Connelly

Csaba

Aquino

et al. 2021

Preprint

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Lithography scaling issues associated with III–V MOSFETs

Ignatova

Thoms

Jansen

et al. 2010

Microelectronic Engineering

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Efficient electromagnetic transducers for spin-wave devices

Connelly

Csaba

Aquino

et al. 2021

Sci Rep

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This paper presents a system-level efficiency analysis, a rapid design methodology, and a numerical demonstration of efficient sub-micron, spin-wave transducers in a microwave system. Applications such as Boolean spintronics, analog spin-wave-computing, and magnetic microwave circuits are expected to benefit from this analysis and design approach. These applications have the potential to provide a low-power, magnetic paradigm alternative to modern electronic systems, but they have been stymied by a limited understanding of the microwave, system-level design for spin-wave circuits. This paper proposes an end-to-end microwave/spin-wave system model that permits the use of classical microwave network analysis and matching theory towards analyzing and designing efficient transduction systems. This paper further compares magnetostatic-wave transducer theory to electromagnetic simulations and finds close agreement, indicating that the theory, despite simplifying assumptions, is useful for rapid yet accurate transducer design. It further suggests that the theory, when modified to include the exchange interaction, will also be useful to rapidly and accurately design transducers launching magnons at exchange wavelengths. Comparisons are made between microstrip and co-planar waveguide lines, which are expedient, narrowband, and low-efficiency transducers, and grating and meander lines that are capable of high-efficiency and wideband performance. The paper concludes that efficient microwave-to-spin-wave transducers are possible and presents a meander transducer design on YIG capable of launching $$\varvec{\lambda = 500}\,$$ λ = 500 nm spin waves with an efficiency of − 4.45 dB and a 3 dB-bandwidth of 134 MHz.

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Electron beam lithography for high aspect-ratio trench patterning in thick resist: experimental and simulation results

Cited by 4 publications

References 0 publications

Efficient Electromagnetic Transducers For Spin-Wave Devices

Efficient Electromagnetic Transducers For Spin-Wave Devices

Lithography scaling issues associated with III–V MOSFETs

Efficient electromagnetic transducers for spin-wave devices

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