Electron collisions with nitrogen trifluoride<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:mo>(</mml:mo><mml:msub><mml:mi mathvariant="normal">NF</mml:mi><mml:mn>3</mml:mn></mml:msub><mml:mo>)</mml:mo></mml:mrow></mml:math>molecules

Szmytkowski, Czesław; Domaracka, A.; Możejko, Paweł; Ptasińska-Denga, Elżbieta; Kłosowski, Łukasz; Piotrowicz, Michał; Kasperski, Grzegorz

doi:10.1103/physreva.70.032707

Cited by 31 publications

(38 citation statements)

References 55 publications

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“…Also the electron energy in these measurements was restricted up to 200 eV. We also note that there appears to be unusually large disparity between the measured cross sections and the theoretical values [7,8]. The Deutsch-Mark formalism based on the additivity rule has shown to provide very good agreement with the experimental total ionization cross sections for a large number of molecules [7].…”

Section: Introductionmentioning

confidence: 75%

Electron ionization of NF3

Rahman

Gangopadhyay

Limbachiya³

et al. 2012

International Journal of Mass Spectrometry

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Section: Introductionmentioning

confidence: 75%

Electron ionization of NF3

Rahman

Gangopadhyay

Limbachiya³

et al. 2012

International Journal of Mass Spectrometry

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“…Two recent calculations 24,25 indicate that the total cross section should rise in the limit of zero energy, due to the polar character of the molecule. Unfortunately, this was not observed in the experiment 14 , probably because the measurements were stopped at energies higher than the range of such a rise. The rather poor angular resolution of Szmytkowski et al's apparatus make their measurement vulnerable to the angular resolution error at high energies.…”

Section: Total Scattering Cross Sectionmentioning

confidence: 90%

“…The statistical spread (one standard deviation of their weighted mean values) is 1.5% below 1 eV and below 1% at intermediate energies. Total cross sections 14 are compared to experimental elastic 15 , ionization 18 and vibrational excitation (calculated in Born approximation) in Fig. 1.…”

Section: Total Scattering Cross Sectionmentioning

confidence: 99%

“…NF 3 is actually a greenhouse gas with a very high global warming potential which has led to concern on how it is used in the various technologies discussed above 13 . In spite of its importance, experimental studies of electron scattering on NF 3 are rather sparse: for total 14 and elastic 15 cross section measurements come from single laboratories, more measurements exist for ionization [16][17][18] and dissociative electron attachment [19][20][21] . In absence of experiments, several calculations [22][23][24][25] have been performed.…”

Section: Introductionmentioning

confidence: 99%

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Cross Sections for Electron Collisions with NF3

Song¹,

Yoon²,

Cho

et al. 2017

Journal of Physical and Chemical Reference Data

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Cross section data are compiled from the literature for electron collisions with nitrogen trifluoride (NF 3 ) molecules. Cross sections are collected and reviewed for total scattering, elastic scattering, momentum transfer, excitations of rotational and vibrational states, dissociation, ionization, and dissociative attachment. For each of these processes, the recommended values of the cross sections are presented. The literature has been surveyed up to the end of 2016.

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“…13 These cross sections can be used as inputs for FEBIP models if the values are converted to the corresponding tot for molecules in the adsorbed phase. Mitsuishi et al, 14 Fowlkes et al, 15 and SilvisCividjian et al 16 have used such cross sections as input for Monte Carlo simulations.…”

Section: Introductionmentioning

confidence: 99%

Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy

Dorp

Wnuk

Gorham

et al. 2009

Journal of Applied Physics

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Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energyCite as: J. Appl. Phys. 106, 074903 (2009) The total cross section has been measured for the electron induced dissociation of trimethyl ͑methylcyclopentadienyl͒ platinum ͑IV͒ ͓MeCpPt͑IV͒Me 3 ͔, a Pt precursor often used in focused electron beam induced processing ͑FEBIP͒, for incident electron energies ranging between 3-3 keV. Measurements were performed for the precursor in the adsorbed state under ultrahigh vacuum conditions. The techniques used in this study were temperature programmed desorption, x-ray photoelectron spectroscopy and mass spectrometry. Two surfaces were used in these experiments, amorphous carbon overlayers containing embedded Pt atoms ͑a:C-Pt͒, formed by the electron decomposition of the Pt precursor, and atomically clean Au. The results from these three experiments revealed a comparatively low total cross section at 8 eV ͑4.2Ϯ 0.3ϫ 10 −17 cm 2 on the a:C-Pt and 1.4Ϯ 0.1ϫ 10 −17 cm 2 on the Au͒ that increases with increasing incident electron energy, reaching a maximum at around 150 eV ͑4.1Ϯ 0.5ϫ 10 −16 cm 2 on the a:C-Pt and 2.3Ϯ 0.2 ϫ 10 −16 cm 2 on the clean Au͒, before decreasing at higher incident electron energies, up to 3000 eV. Differences in the measured cross sections between Au and a:C-Pt surfaces demonstrate that the substrate can influence the reaction cross section of adsorbed species. Temperature programmed desorption was also used to measure the adsorption energy of MeCpPt͑IV͒Me 3 , which was found to depend on both the substrate and the adsorbate coverage. The work in this paper demonstrates that surface science techniques can be used to quantitatively determine the total cross section of adsorbed FEBIP precursors for electron induced dissociation as a function of incident electron energy. These total cross section values are necessary to obtain quantitatively accurate information from FEBIP models and to compare the reaction efficiencies of different precursors on a quantitative basis.

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Electron collisions with nitrogen trifluoride(NF3)molecules

Cited by 31 publications

References 55 publications

Electron ionization of NF3

Electron ionization of NF3

Cross Sections for Electron Collisions with NF3

Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy

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