Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
Abstract:The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. Due to a strong geometric asymmetry and a blocking capacitor, the discharge features a large negative self-bias conducive to sputtering applications. Employing decomposition of the electron transport parallel and perpendicular to the magnetic field lines, it is shown that for the considered magnetic field topo… Show more
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