2017
DOI: 10.1063/1.5000044
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Electron heating and mode transition in dual frequency atmospheric pressure argon dielectric barrier discharge

Abstract: Plasma ionization, excitation, mode transitions and associated electron heating mechanisms in atmospheric pressure dielectric barrier discharges (DBD) driven by dual radio frequency sources are investigated in this paper. The electrons are found to be heated mainly by the high frequency component in the plasma bulk when discharged in α mode. On the contrary, the low frequency component is primarily responsible for heating in the sheath which is caused by intense motion in the sheath. It was also found that var… Show more

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Cited by 16 publications
(14 citation statements)
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“…One of the crucial pieces of information in this diagnostic method is the electron energy distribution function (EEDF). The Maxwellian distribution is reasonable and acceptable in discharges at atmospheric pressure [161,162], and it was used to determine the κ ea value in the earlier works. For distributions other than Maxwellian, the κ ea value should be carefully calculated with known EEDFs.…”
Section: Practical Considerations On Diagnosticsmentioning
confidence: 99%
“…One of the crucial pieces of information in this diagnostic method is the electron energy distribution function (EEDF). The Maxwellian distribution is reasonable and acceptable in discharges at atmospheric pressure [161,162], and it was used to determine the κ ea value in the earlier works. For distributions other than Maxwellian, the κ ea value should be carefully calculated with known EEDFs.…”
Section: Practical Considerations On Diagnosticsmentioning
confidence: 99%
“…One of crucial information on this diagnostic method is the electron energy distribution function (EEDF). In this work, the Maxwellian distribution, which is reasonable and acceptable in argon glow discharges at atmospheric pressure 27 , 28 , was used to determine the κ ea value. For distributions other than Maxwellian, the κ ea value should be carefully calculated with known EEDFs.…”
Section: Methodsmentioning
confidence: 99%
“…In the γ-mode, the atmospheric pressure discharge tends to localize and a DBD configuration is helpful to achieve a diffuse discharge [15], [16]. At atmospheric pressure, the transition from α-mode to γ-mode is observed in RF discharges [17]- [19] as well as in dual RF-LF discharges [20]. According to the literature, there are two distinct ways to reach the transition: either increase the electric field into the sheath by increasing the voltage amplitude [17] or increase the secondary electron emission by applying a low frequency voltage able to transport the ions to the cathode [20].…”
Section: Introductionmentioning
confidence: 99%
“…In an atmospheric pressure dual frequency (DF) plasma (14 MHz-2 MHz), increasing the voltage amplitude of the lower frequency component induces the increase of the electric field into the sheath. Ionization then takes place within the sheath and the transition from the α-mode to the γ-mode occurs [19]. The ionization mechanism shifts from wave riding to cathode secondary emission and the electron temperature increases.…”
Section: Introductionmentioning
confidence: 99%