Electron kinetics in a positive column of AC discharges in a dynamic regime

Abstract

We have performed hybrid kinetic-fluid simulations of a positive column in AC Argon discharges over a range of driving frequencies f and gas pressure p for the conditions when the spatial nonlocality of the Electron Energy Distribution Function (EEDF) is substantial. Our simulations confirmed that the most efficient conditions of plasma maintenance are observed in the dynamic regimewhen time modulations of mean electron energy (temperature) are substantial. The minimal values of the root mean square (rms) electric field and the electron temperature have been observed at f/p values of about 3 kHz/Torr in a tube of radius R = 1 cm. The ionization rate and plasma density reached maximal values under these conditions.