Electron Microscopic Study of the Influence of Annealing on Ge–Sb–Te Thin Films Obtained by Vacuum Thermal Evaporation

Sybina, Yu. S.; Боргардт, Н. И.; Lazarenko, Petr; Parsegova, V. S.; Prikhodko, A. S.; Шерченков, А. А.

doi:10.1134/s1027451019050380

J. Synch. Investig.

2019

DOI: 10.1134/s1027451019050380

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Electron Microscopic Study of the Influence of Annealing on Ge–Sb–Te Thin Films Obtained by Vacuum Thermal Evaporation

Yu. S. Sybina

Н. И. Боргардт

Petr Lazarenko

et al.

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Electron Microscopic Study of the Influence of Annealing on Ge–Sb–Te Thin Films Obtained by Vacuum Thermal Evaporation

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