Electron population properties with different energies in a helicon plasma source

Abstract

The characteristics of electrons play a dominant role in determining the ionization and acceleration processes of plasmas. Compared with electrostatic diagnostics, the optical method is independent of the radio frequency (RF) noise, magnetic field, and electric field. In this paper, an optical emission spectroscope was used to determine the plasma emission spectra, electron excitation energy population distributions (EEEPDs), growth rates of low-energy and high-energy electrons, and their intensity jumps with input powers. The 56 emission lines with the highest signal-to-noise ratio and their corresponding electron excitation energy were used for the translation of the spectrum into EEEPD. One discrete EEEPD has two clear different regions, namely the low-energy electron excitation region (neutral lines with threshold energy of 13–15 eV) and the high-energy electron excitation region (ionic lines with threshold energy ≥19 eV). The EEEPD variations with different diameters of discharge tubes (20 mm, 40 mm, and 60 mm) and different input RF powers (200–1800 W) were investigated. By normalized intensity comparison of the ionic and neutral lines, the growth rate of the ionic population was higher than the neutral one, especially when the tube diameter was less than 40 mm and the input power was higher than 1000 W. Moreover, we found that the intensities of low-energy electrons and high-energy electrons jump at different input powers from inductively coupled (H) mode to helicon (W) mode; therefore, the determination of W mode needs to be carefully considered.

Development of a compact high-density blue core helicon plasma device under 2000 G magnetic field of ring permanent magnets

“…This shift in light corresponds to a jump in density, as shown in figure 6(c). Existing literature shows that the light radiated from plasma jumps from pink light to blue light, which is a manifestation of neutral depletion and high ionization rate [41], and the ionization rate can even reach nearly 80% [6]. After the appearance of the blue core mode, as the power decreases, it can be found that the blue core can exist at a lower power than the previously mentioned threshold power until it falls below another threshold power, that is, downward threshold power, where the blue core mode disappears.…”