Electron series resonance in a magnetized 13.56 MHz symmetric capacitive coupled discharge

Joshi, J. K.; Binwal, S.; Karkari, S. K.; Kumar, Sunil

doi:10.1063/1.5009484

Cited by 17 publications

(7 citation statements)

References 28 publications

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“…Consequently, the excitation of the higher harmonics can drastically enhance the local electron power deposition, particularly at low pressures [39][40][41][42]. The nonlinear PSR oscillations and the harmonic excitations are sensitive to the discharge asymmetry, which can be formed either geometrically [36][37][38][39], electrically [37,[47][48][49][50][51][52][53][54][55][56], or magnetically [57][58][59][60][61][62][63].…”

Section: Introductionmentioning

confidence: 99%

Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power

Zhou¹,

Zhao²,

Wen³

et al. 2021

Plasma Sources Sci. Technol.

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It is recognized that in large-area, very-high-frequency capacitively coupled plasma (VHF CCP) reactors, the higher harmonics generated by nonlinear sheath motion can lead to enhanced standing wave excitation. In this work, a self-consistent electromagnetic model, which couples a one-dimensional, radial nonlinear transmission line model with a bulk plasma ﬂuid model, is employed to investigate the nonlinear standing wave excitation in a VHF driven, geometrically asymmetric capacitive argon discharge operated at low pressure. By considering a radially nonuniform plasma density proﬁle (case I ) calculated self-consistently by the nonlinear electromagnetic model and the corresponding radially-averaged, uniform plasma density proﬁle (case II ), we ﬁrst examine the eﬀect of the plasma density nonuniformity on the propagation of electromagnetic surface waves in a 3 Pa argon discharge driven at 100MHz and 90W. Compared to case II, the higher plasma density at the radial center in case I determines a higher plasma series resonance frequency, yielding stronger high-order harmonic excitations and more signiﬁcant central peak in the harmonic current density Jz,n and the harmonic electron power absorption pn proﬁles. Therefore, under the assumption of the radially uniform plasma density in a CCP discharge, the self-excitation of higher harmonics at the radial center should be underestimated. Second, using the self-consistent electromagnetic model, the eﬀect of the rf power on the excitation of nonlinear standing waves is investigated in a 3 Pa argon discharge driven at 100MHz. At a low power of 30W, the discharge is dominated by the ﬁrst two harmonics. The higher harmonic excitations and the nonlinear standing waves are observed to be enhanced with increasing the rf power, resulting in a more pronounced central peak in the radial proﬁles of the total electron power absorption density pe, the electron temperature Te, and the electron density ne. For all rf powers, the calculated radial proﬁles of ne show good agreement with the experimental data obtained by a floating double probe.

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Section: Introductionmentioning

confidence: 99%

Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power

Zhou¹,

Zhao²,

Wen³

et al. 2021

Plasma Sources Sci. Technol.

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show abstract

“…Also the other mechanisms were seen in magnetized plasmas. NERH was investigated for different values of the magnetic flux density in RF driven planar magnetron plasmas [50,51]. Electric field reversal was also observed and connected with the inhibited electron transport due to the magnetic field [10,[52][53][54].…”

Section: Introductionmentioning

confidence: 99%

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

Eremin

Engel

Krüger

et al. 2023

Plasma Sources Sci. Technol.

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The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven,magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated.The device in focus is a geometrically asymmetric cylindrical magnetron with a radially nonuniformmagnetic field in axial direction and an electric field in radial direction. The dynamics is studiedanalytically using the cold plasma model and a single-particle formalism, and numerically with theinhouse energy and charge conserving particle-in-cell/Monte Carlo collisions code ECCOPIC1S-M.It is found that the dynamics differs significantly from that of an unmagnetized reference discharge.In the magnetized region in front of the powered electrode, an enhanced electric field arises duringsheath expansion and a reversed electric field during sheath collapse. Both fields are needed toensure discharge sustaining electron transport against the confining effect of the magnetic field.The corresponding azimuthal E×B-drift can accelerate electrons into the inelastic energy rangewhich gives rise to a new mechanism of RF power dissipation. It is related to the Hall current andis different in nature from Ohmic heating, as which it has been classified in previous literature.The new heating is expected to be dominant in many magnetized capacitively coupled discharges.It is proposed to term it the “μ-mode” to separate it from other heating modes.

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“…Also the other mechanisms were seen in magnetized plasmas. NERH was investigated for different values of the magnetic flux density in RF driven planar magnetron plasmas [50,51].…”

Section: Introductionmentioning

confidence: 99%

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode

Eremin¹,

Engel²,

Krüger³

et al. 2022

Preprint

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The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated.The device in focus is a geometrically asymmetric cylindrical magnetron with a radially nonuniform magnetic field in axial direction and an electric field in radial direction. The dynamics is studied analytically using the cold plasma model and a single-particle formalism, and numerically with the inhouse energy and charge conserving particle-in-cell/Monte Carlo collisions code ECCOPIC1S-M.It is found that the dynamics differs significantly from that of an unmagnetized reference discharge.In the magnetized region in front of the powered electrode, an enhanced electric field arises during sheath expansion and a reversed electric field during sheath collapse. Both fields are needed to ensure discharge sustaining electron transport against the confining effect of the magnetic field.The corresponding azimuthal E×B-drift can accelerate electrons into the inelastic energy range which gives rise to a new mechanism of RF power dissipation. It is related to the Hall current and is different in nature from Ohmic heating, as which it has been classified in previous literature.The new heating is expected to be dominant in many magnetized capacitively coupled discharges.It is proposed to term it the "µ-mode" to separate it from other heating modes.

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Electron series resonance in a magnetized 13.56 MHz symmetric capacitive coupled discharge

Cited by 17 publications

References 28 publications

Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power

Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode

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