Electronic transport study for SF6 Plasma

Abstract

Determination the electron transport parameters, (drift velocity ( ) , mean electron en­ergy ( ), diffusion coefficient (D), mobility ( ) and ionization coeffi­cient ( ) ), in an at­tempt to show the influence of the presence of dust on their behavior in a direct cur­rent low pres­sure SF6 glow discharge .The Boltz­mann Transport Equation (BTE), using two-term approxima­tion are solved self-consistly. Making use of simulation model program for the numerical finite element method (FEM) of the boltzman equation to calculate the electron energy distribution function and the transport parameters in the range of reduced electric field E/N (300_1000 Td). As well as evaluated the electron temperature in pristine and dusty plasma and dust surface potential at E/N (40 Td) .