Electroplated Magnet Membranes for MEMS Applications

Abstract

The influence of a magnetic field on electrodeposition of nickel films over polymeric substrates which renders flexible membranes with permanent magnet layers is studied. Samples of membranes with nickel deposited by electroplating in presence and absence of magnetic field are compared. To improve adherence, the electroplated layer is deposited over an electroless contact layer, after a wet pre-treatment. Mechanical and magnetic properties of the samples were measured as function of process parameters. Experimental results confirm that the magnetic field has a positive impact over properties of deposited films.