2006
DOI: 10.1016/j.msea.2005.09.113
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Elimination of surface debris generated by KrF excimer laser ablation of polyimide

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Cited by 3 publications
(3 citation statements)
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“…For this, Menzel-Glazer cover slips were first coated with a layer of liquid ink blackboard maker (Pentel easyflo) to provide a sacrificial layer before ablation. [27] Microwells (15 μm diameter, 18 μm pitch) in a ten by ten array were ablated individually into the cover slip using a 157 nm F 2 eximer laser. Radiation of 157 nm was delivered from a Coherent LPF220i laser source and coupled through an enclosed, N 2 -perfused, 3 metre long beamline, to a 25x Schwarzschild projection lens.…”
Section: Methodsmentioning
confidence: 99%
“…For this, Menzel-Glazer cover slips were first coated with a layer of liquid ink blackboard maker (Pentel easyflo) to provide a sacrificial layer before ablation. [27] Microwells (15 μm diameter, 18 μm pitch) in a ten by ten array were ablated individually into the cover slip using a 157 nm F 2 eximer laser. Radiation of 157 nm was delivered from a Coherent LPF220i laser source and coupled through an enclosed, N 2 -perfused, 3 metre long beamline, to a 25x Schwarzschild projection lens.…”
Section: Methodsmentioning
confidence: 99%
“…Polyimide is also used for its good mechanical strength, high thermal properties, and resistance to abrasive chemicals. Most research papers have concentrated their research on the Dupont™ brand of polyimide films (Srinivasan, 1993; Luk'yanchuk et al , 1997; Ilie et al , 2005, 2007; Mullan et al , 2005, 2007; Himmelbauer et al , 1996; Küper et al , 1993; Metayer et al , 2001; Bäuerle et al , 1997; Pervolaraki et al , 2004; Li et al , 2004; Hauer et al , 2003; Shin et al , 2006). There are many suppliers of polyimide film within the FPCB industry, but there are no comparison studies indicating how the various properties of these films can be used for microvia drilling.…”
Section: Introductionmentioning
confidence: 99%
“…As with the lack of comparative research studies on variations of polyimide film from different manufacturers, research on the types of lasers used for processing has also been limited. Laser choices for research have primarily been excimer and Nd:YAG, and research has focused more on using excimer lasers in the 193 to 351 nm wavelength ranges (Kawamura et al , 1982; Srinivasan and Mayne‐Banton, 1982; Srinivasan, 1993; Pan et al , 2007; Lippert and Dickinson, 2003; Luk'yanchuk et al , 1997; Himmelbauer et al , 1996; Küper et al , 1993; Ilie et al , 2007; Metayer et al , 2001; Bäuerle et al , 1997; Gu et al , 2002; Zweig and Deutsch, 1992; Hauer et al , 2003; Lippert et al , 2003; Shin et al , 2006; Kordás et al , 2001). Excimer lasers' broad range of UV wavelengths, small features sizes, and variable pulse widths have made them useful research tools.…”
Section: Introductionmentioning
confidence: 99%