“…Until now, tremendous innovative strategies have been presented to overcome Si challenges for powder-based LIBs, such as powder nanosizing, 15 morphology control, 16,17 surface coating, 17,18 composite formulation, 19,20 doping, 21 functional binder composites, 22,23 and electrolyte optimization. 24,25 While it might be more daunting to tackle these issues for thin films limited by geometric constraints, 26,27 recently, multiscale micro-pattern design has emerged widely for thin film anode materials such as Li metal, 28,29 pure-Si, 30,31 composites, 32,33 and copper current collectors, 34 even expanding to cathodes 35 and entire cells, 36,37 to effectively facilitate stress evolution. It is well known that the eigen deformation of a free-standing material does not lead to mechanical stress, but only to self-compatible deformations, and eigen-strain-induced stresses are generated when the eigen strain is constrained.…”