This paper describes the ignition characteristics of Al/CuO nanoenergetic multilayer films (nEMFs) integrated with semiconductor bridge (SCB). The as-deposited Al/CuO nEMFs were identified with SEM and differential scanning calorimetry. Results show that distinct Al/CuO nEMFs are sputter deposited in a layered geometry, and the Al/CuO nEMFs gives a reaction heat equal to 2181 J/g. The firing experiments show that Al/CuO nEMFs have no influence on the electrical properties of SCB. Furthermore, the rapid combustion of Al/CuO nEMFs is able to assist SCB generating high-temperature plasma and products, such that enhance the ignition reliability.