Enhanced diffusion barrier property of nanolayered NbMoTaW/TiVCr high entropy alloy for copper metallization

Li, P.F.; Ma, Yue; Ma, Hua; Ta, Shiwo; Yang, Zenan; Han, Xiangxiang; Kai, Mei; Chen, J.H.; Cao, Zhenhua

doi:10.1016/j.jallcom.2021.162574

Cited by 10 publications

(1 citation statement)

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“…From the cross-section SEM, it can be seen that the TaTiNbZr high-entropy alloy and the supporting material, Ta, are dense and uniform, and the multilayer structure of the sample remains intact, with a clear interlayer interface and a stable structure. From previous studies on high-entropy alloys, it can be seen that new phases appear in XRD when the high-entropy alloys fail; for example, when FeCoBTiNb or NbMoTaW/TiVCr is used as a Cu/Si barrier layer, the Cu 3 Si phase will appear when the barrier layer fails [30,31]. In this study, after annealing at 600 • C for 24 h, the amorphous structure of the high-entropy alloy is stabilized without the appearance of new phases, which is consistent with the phase of the as-deposited state.…”

Section: Hydrogen Permeation Through Pd/tatinbzr/ta and Pd/tamentioning

confidence: 99%

Improved High-Temperature Stability and Hydrogen Penetration through a Pd/Ta Composite Membrane with a TaTiNbZr Intermediate Layer

Sun,

Liu,

2024

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In the hydrogen separation membrane, a dense TaTiNbZr amorphous layer was prepared between Pd and Ta to form a Pd/TaTiNbZr/Ta membrane system to prevent the reaction between Pd and Ta at high temperatures. The structural and chemical stability of the Pd/TaTiNbZr/Ta film system at high temperatures were investigated by annealing at 600 °C for 24 h. The high-temperature hydrogen permeation properties of the Pd/TaTiNbZr/Ta film systems were investigated by hydrogen permeation experiments at 600 °C after heat treatment for 6 h. The TaTiNbZr layer was significantly hydrogen-permeable. With the increase in the thickness of the barrier layer, the hydrogen permeability of Pd/TaTiNbZr/Ta decreased, but its hydrogen permeation flux was smaller than that of the highest value of Pd/Ta when it reached the steady state. The presence of the TaTiNbZr layer effectively blocks the interdiffusion between Pd and Ta to form TaPd3, improving the sustained working ability of the Pd/TaTiNbZr/Ta membrane system. The results show that TaTiNbZr is a candidate material for the intermediate layer to improve the high-temperature stability of metal-composite hydrogen separation membranes.

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Section: Hydrogen Permeation Through Pd/tatinbzr/ta and Pd/tamentioning

confidence: 99%