Enhanced Growth Rate and Silane Utilization in Amorphous Silicon and Nanocrystalline-Silicon Solar Cell Deposition via Gas Phase Additives

Ridgeway, Robert G.; Hegedus, Steven; Podraza, Nikolas J.

doi:10.2172/1049689

2012

DOI: 10.2172/1049689

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Enhanced Growth Rate and Silane Utilization in Amorphous Silicon and Nanocrystalline-Silicon Solar Cell Deposition via Gas Phase Additives

Robert G. Ridgeway¹,

Steven Hegedus²,

Nikolas J. Podraza³

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Enhanced Growth Rate and Silane Utilization in Amorphous Silicon and Nanocrystalline-Silicon Solar Cell Deposition via Gas Phase Additives

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References 24 publications

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